3/19/2011	12:03:58 AM	Helium valve closed
3/19/2011	12:03:58 AM	H2 valve closed
3/19/2011	12:03:58 AM	BCl3 valve closed
3/19/2011	12:03:58 AM	PH3 valve closed
3/19/2011	12:03:58 AM	SiCl4 pre valve closed
3/19/2011	12:03:58 AM	SiCl4 post valve closed
3/19/2011	12:03:58 AM	Main Vac valve closed
3/19/2011	12:03:58 AM	Bypass valve closed
3/19/2011	12:03:58 AM	Bubbler valve closed
3/19/2011	12:03:58 AM	Helium MFC set to  0.000000
3/19/2011	12:03:58 AM	H2 MFC set to  0.000000
3/19/2011	12:03:58 AM	BCl3 MFC set to  0.000000
3/19/2011	12:03:58 AM	PHl3 MFC set to  0.000000
3/19/2011	12:03:58 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:03:58 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:03:59 AM	Tube furnace set to 0
3/19/2011	12:03:59 AM	Run finished at 12:03 AM
3/19/2011	12:20:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2011	12:20:10 AM	Recipe started at 12:20 AM
3/19/2011	12:20:10 AM	H2 valve closed
3/19/2011	12:20:10 AM	BCl3 valve closed
3/19/2011	12:20:10 AM	PH3 valve closed
3/19/2011	12:20:10 AM	SiCl4 pre valve closed
3/19/2011	12:20:10 AM	SiCl4 post valve closed
3/19/2011	12:20:10 AM	Main Vac valve closed
3/19/2011	12:20:10 AM	Bypass valve closed
3/19/2011	12:20:10 AM	Bubbler valve closed
3/19/2011	12:20:10 AM	Helium valve opened
3/19/2011	12:20:10 AM	Helium MFC set to  500.000000
3/19/2011	12:20:10 AM	H2 MFC set to  0.000000
3/19/2011	12:20:10 AM	BCl3 MFC set to  0.000000
3/19/2011	12:20:10 AM	PHl3 MFC set to  0.000000
3/19/2011	12:20:10 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:20:10 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:20:10 AM	Tube furnace set to 0
3/19/2011	12:20:15 AM	Helium valve closed
3/19/2011	12:20:15 AM	H2 valve closed
3/19/2011	12:20:15 AM	BCl3 valve closed
3/19/2011	12:20:15 AM	PH3 valve closed
3/19/2011	12:20:15 AM	SiCl4 pre valve closed
3/19/2011	12:20:15 AM	SiCl4 post valve closed
3/19/2011	12:20:15 AM	Main Vac valve closed
3/19/2011	12:20:15 AM	Bypass valve closed
3/19/2011	12:20:16 AM	Bubbler valve closed
3/19/2011	12:20:16 AM	Helium MFC set to  0.000000
3/19/2011	12:20:16 AM	H2 MFC set to  0.000000
3/19/2011	12:20:16 AM	BCl3 MFC set to  0.000000
3/19/2011	12:20:16 AM	PHl3 MFC set to  0.000000
3/19/2011	12:20:16 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:20:16 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:20:16 AM	Tube furnace set to 0
3/19/2011	12:20:16 AM	Run finished at 12:20 AM
3/19/2011	12:20:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2011	12:23:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	12:23:06 AM	Recipe started at 12:23 AM
3/19/2011	12:23:06 AM	Helium valve closed
3/19/2011	12:23:06 AM	H2 valve closed
3/19/2011	12:23:06 AM	BCl3 valve closed
3/19/2011	12:23:06 AM	PH3 valve closed
3/19/2011	12:23:06 AM	SiCl4 pre valve closed
3/19/2011	12:23:06 AM	SiCl4 post valve closed
3/19/2011	12:23:06 AM	Main Vac valve closed
3/19/2011	12:23:06 AM	Bubbler valve closed
3/19/2011	12:23:06 AM	Bypass valve opened
3/19/2011	12:23:06 AM	Helium MFC set to  0.000000
3/19/2011	12:23:06 AM	H2 MFC set to  0.000000
3/19/2011	12:23:06 AM	BCl3 MFC set to  0.000000
3/19/2011	12:23:06 AM	PHl3 MFC set to  0.000000
3/19/2011	12:23:06 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:23:06 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:23:06 AM	Tube furnace set to 0
3/19/2011	12:23:38 AM	Helium valve closed
3/19/2011	12:23:38 AM	H2 valve closed
3/19/2011	12:23:38 AM	BCl3 valve closed
3/19/2011	12:23:38 AM	PH3 valve closed
3/19/2011	12:23:38 AM	SiCl4 pre valve closed
3/19/2011	12:23:38 AM	SiCl4 post valve closed
3/19/2011	12:23:38 AM	Bubbler valve closed
3/19/2011	12:23:38 AM	Main Vac valve opened
3/19/2011	12:23:38 AM	Bypass valve opened
3/19/2011	12:23:38 AM	Helium MFC set to  0.000000
3/19/2011	12:23:38 AM	H2 MFC set to  0.000000
3/19/2011	12:23:38 AM	BCl3 MFC set to  0.000000
3/19/2011	12:23:38 AM	PHl3 MFC set to  0.000000
3/19/2011	12:23:38 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:23:38 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:23:38 AM	Tube furnace set to 0
3/19/2011	12:23:38 AM	Run finished at 12:23 AM
3/19/2011	12:23:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	12:24:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/19/2011	12:24:13 AM	Recipe started at 12:24 AM
3/19/2011	12:24:13 AM	Helium valve closed
3/19/2011	12:24:13 AM	H2 valve closed
3/19/2011	12:24:13 AM	BCl3 valve closed
3/19/2011	12:24:13 AM	PH3 valve closed
3/19/2011	12:24:13 AM	SiCl4 pre valve closed
3/19/2011	12:24:13 AM	SiCl4 post valve closed
3/19/2011	12:24:13 AM	Main Vac valve closed
3/19/2011	12:24:13 AM	Bubbler valve closed
3/19/2011	12:24:13 AM	Bypass valve opened
3/19/2011	12:24:13 AM	Helium MFC set to  0.000000
3/19/2011	12:24:13 AM	H2 MFC set to  0.000000
3/19/2011	12:24:13 AM	BCl3 MFC set to  0.000000
3/19/2011	12:24:13 AM	PHl3 MFC set to  0.000000
3/19/2011	12:24:13 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:24:13 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:24:13 AM	Tube furnace set to 0
3/19/2011	12:24:13 AM	Helium valve closed
3/19/2011	12:24:13 AM	H2 valve closed
3/19/2011	12:24:13 AM	BCl3 valve closed
3/19/2011	12:24:13 AM	PH3 valve closed
3/19/2011	12:24:13 AM	SiCl4 pre valve closed
3/19/2011	12:24:13 AM	SiCl4 post valve closed
3/19/2011	12:24:13 AM	Bubbler valve closed
3/19/2011	12:24:13 AM	Main Vac valve opened
3/19/2011	12:24:13 AM	Bypass valve opened
3/19/2011	12:24:13 AM	Helium MFC set to  0.000000
3/19/2011	12:24:13 AM	H2 MFC set to  0.000000
3/19/2011	12:24:13 AM	BCl3 MFC set to  0.000000
3/19/2011	12:24:13 AM	PHl3 MFC set to  0.000000
3/19/2011	12:24:13 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:24:13 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:24:13 AM	Tube furnace set to 0
3/19/2011	12:25:13 AM	H2 valve closed
3/19/2011	12:25:13 AM	BCl3 valve closed
3/19/2011	12:25:13 AM	PH3 valve closed
3/19/2011	12:25:13 AM	SiCl4 pre valve closed
3/19/2011	12:25:13 AM	SiCl4 post valve closed
3/19/2011	12:25:13 AM	Bubbler valve closed
3/19/2011	12:25:13 AM	Helium valve opened
3/19/2011	12:25:13 AM	Main Vac valve opened
3/19/2011	12:25:13 AM	Bypass valve opened
3/19/2011	12:25:13 AM	Helium MFC set to  100.000000
3/19/2011	12:25:13 AM	H2 MFC set to  0.000000
3/19/2011	12:25:13 AM	BCl3 MFC set to  0.000000
3/19/2011	12:25:13 AM	PHl3 MFC set to  0.000000
3/19/2011	12:25:13 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:25:13 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:25:14 AM	Tube furnace set to 0
3/19/2011	12:26:14 AM	Helium valve closed
3/19/2011	12:26:14 AM	H2 valve closed
3/19/2011	12:26:14 AM	BCl3 valve closed
3/19/2011	12:26:14 AM	PH3 valve closed
3/19/2011	12:26:14 AM	SiCl4 pre valve closed
3/19/2011	12:26:14 AM	SiCl4 post valve closed
3/19/2011	12:26:14 AM	Bubbler valve closed
3/19/2011	12:26:14 AM	Main Vac valve opened
3/19/2011	12:26:14 AM	Bypass valve opened
3/19/2011	12:26:14 AM	Helium MFC set to  0.000000
3/19/2011	12:26:14 AM	H2 MFC set to  0.000000
3/19/2011	12:26:14 AM	BCl3 MFC set to  0.000000
3/19/2011	12:26:14 AM	PHl3 MFC set to  0.000000
3/19/2011	12:26:14 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:26:14 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:26:14 AM	Tube furnace set to 0
3/19/2011	12:27:14 AM	H2 valve closed
3/19/2011	12:27:14 AM	BCl3 valve closed
3/19/2011	12:27:14 AM	PH3 valve closed
3/19/2011	12:27:14 AM	SiCl4 pre valve closed
3/19/2011	12:27:14 AM	SiCl4 post valve closed
3/19/2011	12:27:14 AM	Bubbler valve closed
3/19/2011	12:27:14 AM	Helium valve opened
3/19/2011	12:27:14 AM	Main Vac valve opened
3/19/2011	12:27:14 AM	Bypass valve opened
3/19/2011	12:27:14 AM	Helium MFC set to  100.000000
3/19/2011	12:27:14 AM	H2 MFC set to  0.000000
3/19/2011	12:27:14 AM	BCl3 MFC set to  0.000000
3/19/2011	12:27:14 AM	PHl3 MFC set to  0.000000
3/19/2011	12:27:14 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:27:14 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:27:14 AM	Tube furnace set to 0
3/19/2011	12:28:14 AM	Helium valve closed
3/19/2011	12:28:14 AM	H2 valve closed
3/19/2011	12:28:14 AM	BCl3 valve closed
3/19/2011	12:28:14 AM	PH3 valve closed
3/19/2011	12:28:14 AM	SiCl4 pre valve closed
3/19/2011	12:28:14 AM	SiCl4 post valve closed
3/19/2011	12:28:14 AM	Bubbler valve closed
3/19/2011	12:28:14 AM	Main Vac valve opened
3/19/2011	12:28:14 AM	Bypass valve opened
3/19/2011	12:28:14 AM	Helium MFC set to  0.000000
3/19/2011	12:28:14 AM	H2 MFC set to  0.000000
3/19/2011	12:28:14 AM	BCl3 MFC set to  0.000000
3/19/2011	12:28:14 AM	PHl3 MFC set to  0.000000
3/19/2011	12:28:14 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:28:14 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:28:14 AM	Tube furnace set to 0
3/19/2011	12:29:14 AM	H2 valve closed
3/19/2011	12:29:14 AM	BCl3 valve closed
3/19/2011	12:29:14 AM	PH3 valve closed
3/19/2011	12:29:14 AM	SiCl4 pre valve closed
3/19/2011	12:29:14 AM	SiCl4 post valve closed
3/19/2011	12:29:14 AM	Bubbler valve closed
3/19/2011	12:29:14 AM	Helium valve opened
3/19/2011	12:29:14 AM	Main Vac valve opened
3/19/2011	12:29:14 AM	Bypass valve opened
3/19/2011	12:29:14 AM	Helium MFC set to  100.000000
3/19/2011	12:29:14 AM	H2 MFC set to  0.000000
3/19/2011	12:29:14 AM	BCl3 MFC set to  0.000000
3/19/2011	12:29:14 AM	PHl3 MFC set to  0.000000
3/19/2011	12:29:14 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:29:14 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:29:14 AM	Tube furnace set to 0
3/19/2011	12:30:14 AM	Helium valve closed
3/19/2011	12:30:14 AM	H2 valve closed
3/19/2011	12:30:14 AM	BCl3 valve closed
3/19/2011	12:30:14 AM	PH3 valve closed
3/19/2011	12:30:14 AM	SiCl4 pre valve closed
3/19/2011	12:30:14 AM	SiCl4 post valve closed
3/19/2011	12:30:14 AM	Bubbler valve closed
3/19/2011	12:30:14 AM	Main Vac valve opened
3/19/2011	12:30:14 AM	Bypass valve opened
3/19/2011	12:30:14 AM	Helium MFC set to  0.000000
3/19/2011	12:30:14 AM	H2 MFC set to  0.000000
3/19/2011	12:30:14 AM	BCl3 MFC set to  0.000000
3/19/2011	12:30:14 AM	PHl3 MFC set to  0.000000
3/19/2011	12:30:14 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:30:14 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:30:15 AM	Tube furnace set to 0
3/19/2011	12:31:15 AM	H2 valve closed
3/19/2011	12:31:15 AM	BCl3 valve closed
3/19/2011	12:31:15 AM	PH3 valve closed
3/19/2011	12:31:15 AM	SiCl4 pre valve closed
3/19/2011	12:31:15 AM	SiCl4 post valve closed
3/19/2011	12:31:15 AM	Bubbler valve closed
3/19/2011	12:31:15 AM	Helium valve opened
3/19/2011	12:31:15 AM	Main Vac valve opened
3/19/2011	12:31:15 AM	Bypass valve opened
3/19/2011	12:31:15 AM	Helium MFC set to  100.000000
3/19/2011	12:31:15 AM	H2 MFC set to  0.000000
3/19/2011	12:31:15 AM	BCl3 MFC set to  0.000000
3/19/2011	12:31:15 AM	PHl3 MFC set to  0.000000
3/19/2011	12:31:15 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:31:15 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:31:15 AM	Tube furnace set to 0
3/19/2011	12:32:15 AM	Helium valve closed
3/19/2011	12:32:15 AM	H2 valve closed
3/19/2011	12:32:15 AM	BCl3 valve closed
3/19/2011	12:32:15 AM	PH3 valve closed
3/19/2011	12:32:15 AM	SiCl4 pre valve closed
3/19/2011	12:32:15 AM	SiCl4 post valve closed
3/19/2011	12:32:15 AM	Bubbler valve closed
3/19/2011	12:32:15 AM	Main Vac valve opened
3/19/2011	12:32:15 AM	Bypass valve opened
3/19/2011	12:32:15 AM	Helium MFC set to  0.000000
3/19/2011	12:32:15 AM	H2 MFC set to  0.000000
3/19/2011	12:32:15 AM	BCl3 MFC set to  0.000000
3/19/2011	12:32:15 AM	PHl3 MFC set to  0.000000
3/19/2011	12:32:15 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:32:15 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:32:15 AM	Tube furnace set to 0
3/19/2011	12:33:15 AM	H2 valve closed
3/19/2011	12:33:15 AM	BCl3 valve closed
3/19/2011	12:33:15 AM	PH3 valve closed
3/19/2011	12:33:15 AM	SiCl4 pre valve closed
3/19/2011	12:33:15 AM	SiCl4 post valve closed
3/19/2011	12:33:15 AM	Bubbler valve closed
3/19/2011	12:33:15 AM	Helium valve opened
3/19/2011	12:33:15 AM	Main Vac valve opened
3/19/2011	12:33:15 AM	Bypass valve opened
3/19/2011	12:33:15 AM	Helium MFC set to  100.000000
3/19/2011	12:33:15 AM	H2 MFC set to  0.000000
3/19/2011	12:33:15 AM	BCl3 MFC set to  0.000000
3/19/2011	12:33:15 AM	PHl3 MFC set to  0.000000
3/19/2011	12:33:15 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:33:15 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:33:15 AM	Tube furnace set to 0
3/19/2011	12:34:15 AM	Helium valve closed
3/19/2011	12:34:15 AM	H2 valve closed
3/19/2011	12:34:15 AM	BCl3 valve closed
3/19/2011	12:34:15 AM	PH3 valve closed
3/19/2011	12:34:15 AM	SiCl4 pre valve closed
3/19/2011	12:34:15 AM	SiCl4 post valve closed
3/19/2011	12:34:15 AM	Bubbler valve closed
3/19/2011	12:34:15 AM	Main Vac valve opened
3/19/2011	12:34:15 AM	Bypass valve opened
3/19/2011	12:34:15 AM	Helium MFC set to  0.000000
3/19/2011	12:34:15 AM	H2 MFC set to  0.000000
3/19/2011	12:34:15 AM	BCl3 MFC set to  0.000000
3/19/2011	12:34:15 AM	PHl3 MFC set to  0.000000
3/19/2011	12:34:15 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:34:15 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:34:15 AM	Tube furnace set to 0
3/19/2011	12:35:15 AM	H2 valve closed
3/19/2011	12:35:15 AM	BCl3 valve closed
3/19/2011	12:35:16 AM	PH3 valve closed
3/19/2011	12:35:16 AM	SiCl4 pre valve closed
3/19/2011	12:35:16 AM	SiCl4 post valve closed
3/19/2011	12:35:16 AM	Bubbler valve closed
3/19/2011	12:35:16 AM	Helium valve opened
3/19/2011	12:35:16 AM	Main Vac valve opened
3/19/2011	12:35:16 AM	Bypass valve opened
3/19/2011	12:35:16 AM	Helium MFC set to  100.000000
3/19/2011	12:35:16 AM	H2 MFC set to  0.000000
3/19/2011	12:35:16 AM	BCl3 MFC set to  0.000000
3/19/2011	12:35:16 AM	PHl3 MFC set to  0.000000
3/19/2011	12:35:16 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:35:16 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:35:16 AM	Tube furnace set to 0
3/19/2011	12:36:16 AM	Helium valve closed
3/19/2011	12:36:16 AM	H2 valve closed
3/19/2011	12:36:16 AM	BCl3 valve closed
3/19/2011	12:36:16 AM	PH3 valve closed
3/19/2011	12:36:16 AM	SiCl4 pre valve closed
3/19/2011	12:36:16 AM	SiCl4 post valve closed
3/19/2011	12:36:16 AM	Bubbler valve closed
3/19/2011	12:36:16 AM	Main Vac valve opened
3/19/2011	12:36:16 AM	Bypass valve opened
3/19/2011	12:36:16 AM	Helium MFC set to  0.000000
3/19/2011	12:36:16 AM	H2 MFC set to  0.000000
3/19/2011	12:36:16 AM	BCl3 MFC set to  0.000000
3/19/2011	12:36:16 AM	PHl3 MFC set to  0.000000
3/19/2011	12:36:16 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:36:16 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:36:16 AM	Tube furnace set to 0
3/19/2011	12:37:16 AM	H2 valve closed
3/19/2011	12:37:16 AM	BCl3 valve closed
3/19/2011	12:37:16 AM	PH3 valve closed
3/19/2011	12:37:16 AM	SiCl4 pre valve closed
3/19/2011	12:37:16 AM	SiCl4 post valve closed
3/19/2011	12:37:16 AM	Bubbler valve closed
3/19/2011	12:37:16 AM	Helium valve opened
3/19/2011	12:37:16 AM	Main Vac valve opened
3/19/2011	12:37:16 AM	Bypass valve opened
3/19/2011	12:37:16 AM	Helium MFC set to  100.000000
3/19/2011	12:37:16 AM	H2 MFC set to  0.000000
3/19/2011	12:37:16 AM	BCl3 MFC set to  0.000000
3/19/2011	12:37:16 AM	PHl3 MFC set to  0.000000
3/19/2011	12:37:16 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:37:16 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:37:16 AM	Tube furnace set to 0
3/19/2011	12:38:16 AM	Helium valve closed
3/19/2011	12:38:16 AM	H2 valve closed
3/19/2011	12:38:16 AM	BCl3 valve closed
3/19/2011	12:38:16 AM	PH3 valve closed
3/19/2011	12:38:16 AM	SiCl4 pre valve closed
3/19/2011	12:38:16 AM	SiCl4 post valve closed
3/19/2011	12:38:16 AM	Bubbler valve closed
3/19/2011	12:38:16 AM	Main Vac valve opened
3/19/2011	12:38:16 AM	Bypass valve opened
3/19/2011	12:38:16 AM	Helium MFC set to  0.000000
3/19/2011	12:38:16 AM	H2 MFC set to  0.000000
3/19/2011	12:38:16 AM	BCl3 MFC set to  0.000000
3/19/2011	12:38:16 AM	PHl3 MFC set to  0.000000
3/19/2011	12:38:16 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:38:16 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:38:16 AM	Tube furnace set to 0
3/19/2011	12:39:16 AM	H2 valve closed
3/19/2011	12:39:16 AM	BCl3 valve closed
3/19/2011	12:39:16 AM	PH3 valve closed
3/19/2011	12:39:16 AM	SiCl4 pre valve closed
3/19/2011	12:39:16 AM	SiCl4 post valve closed
3/19/2011	12:39:16 AM	Bubbler valve closed
3/19/2011	12:39:16 AM	Helium valve opened
3/19/2011	12:39:16 AM	Main Vac valve opened
3/19/2011	12:39:16 AM	Bypass valve opened
3/19/2011	12:39:16 AM	Helium MFC set to  100.000000
3/19/2011	12:39:16 AM	H2 MFC set to  0.000000
3/19/2011	12:39:16 AM	BCl3 MFC set to  0.000000
3/19/2011	12:39:16 AM	PHl3 MFC set to  0.000000
3/19/2011	12:39:16 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:39:16 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:39:16 AM	Tube furnace set to 0
3/19/2011	12:40:16 AM	Helium valve closed
3/19/2011	12:40:17 AM	H2 valve closed
3/19/2011	12:40:17 AM	BCl3 valve closed
3/19/2011	12:40:17 AM	PH3 valve closed
3/19/2011	12:40:17 AM	SiCl4 pre valve closed
3/19/2011	12:40:17 AM	SiCl4 post valve closed
3/19/2011	12:40:17 AM	Bubbler valve closed
3/19/2011	12:40:17 AM	Main Vac valve opened
3/19/2011	12:40:17 AM	Bypass valve opened
3/19/2011	12:40:17 AM	Helium MFC set to  0.000000
3/19/2011	12:40:17 AM	H2 MFC set to  0.000000
3/19/2011	12:40:17 AM	BCl3 MFC set to  0.000000
3/19/2011	12:40:17 AM	PHl3 MFC set to  0.000000
3/19/2011	12:40:17 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:40:17 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:40:17 AM	Tube furnace set to 0
3/19/2011	12:41:17 AM	H2 valve closed
3/19/2011	12:41:17 AM	BCl3 valve closed
3/19/2011	12:41:17 AM	PH3 valve closed
3/19/2011	12:41:17 AM	SiCl4 pre valve closed
3/19/2011	12:41:17 AM	SiCl4 post valve closed
3/19/2011	12:41:17 AM	Bubbler valve closed
3/19/2011	12:41:17 AM	Helium valve opened
3/19/2011	12:41:17 AM	Main Vac valve opened
3/19/2011	12:41:17 AM	Bypass valve opened
3/19/2011	12:41:17 AM	Helium MFC set to  100.000000
3/19/2011	12:41:17 AM	H2 MFC set to  0.000000
3/19/2011	12:41:17 AM	BCl3 MFC set to  0.000000
3/19/2011	12:41:17 AM	PHl3 MFC set to  0.000000
3/19/2011	12:41:17 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:41:17 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:41:17 AM	Tube furnace set to 0
3/19/2011	12:42:17 AM	Helium valve closed
3/19/2011	12:42:17 AM	H2 valve closed
3/19/2011	12:42:17 AM	BCl3 valve closed
3/19/2011	12:42:17 AM	PH3 valve closed
3/19/2011	12:42:17 AM	SiCl4 pre valve closed
3/19/2011	12:42:17 AM	SiCl4 post valve closed
3/19/2011	12:42:17 AM	Bubbler valve closed
3/19/2011	12:42:17 AM	Main Vac valve opened
3/19/2011	12:42:17 AM	Bypass valve opened
3/19/2011	12:42:17 AM	Helium MFC set to  0.000000
3/19/2011	12:42:17 AM	H2 MFC set to  0.000000
3/19/2011	12:42:17 AM	BCl3 MFC set to  0.000000
3/19/2011	12:42:17 AM	PHl3 MFC set to  0.000000
3/19/2011	12:42:17 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:42:17 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:42:17 AM	Tube furnace set to 0
3/19/2011	12:43:17 AM	H2 valve closed
3/19/2011	12:43:17 AM	BCl3 valve closed
3/19/2011	12:43:17 AM	PH3 valve closed
3/19/2011	12:43:17 AM	SiCl4 pre valve closed
3/19/2011	12:43:17 AM	SiCl4 post valve closed
3/19/2011	12:43:17 AM	Bubbler valve closed
3/19/2011	12:43:17 AM	Helium valve opened
3/19/2011	12:43:17 AM	Main Vac valve opened
3/19/2011	12:43:17 AM	Bypass valve opened
3/19/2011	12:43:17 AM	Helium MFC set to  100.000000
3/19/2011	12:43:17 AM	H2 MFC set to  0.000000
3/19/2011	12:43:17 AM	BCl3 MFC set to  0.000000
3/19/2011	12:43:17 AM	PHl3 MFC set to  0.000000
3/19/2011	12:43:17 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:43:17 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:43:17 AM	Tube furnace set to 0
3/19/2011	12:44:17 AM	Helium valve closed
3/19/2011	12:44:17 AM	H2 valve closed
3/19/2011	12:44:17 AM	BCl3 valve closed
3/19/2011	12:44:17 AM	PH3 valve closed
3/19/2011	12:44:17 AM	SiCl4 pre valve closed
3/19/2011	12:44:17 AM	SiCl4 post valve closed
3/19/2011	12:44:17 AM	Bubbler valve closed
3/19/2011	12:44:17 AM	Main Vac valve opened
3/19/2011	12:44:17 AM	Bypass valve opened
3/19/2011	12:44:17 AM	Helium MFC set to  0.000000
3/19/2011	12:44:17 AM	H2 MFC set to  0.000000
3/19/2011	12:44:17 AM	BCl3 MFC set to  0.000000
3/19/2011	12:44:17 AM	PHl3 MFC set to  0.000000
3/19/2011	12:44:17 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:44:17 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:44:18 AM	Tube furnace set to 0
3/19/2011	12:44:19 AM	Run finished at 12:44 AM
3/19/2011	12:44:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/19/2011	12:45:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/19/2011	12:45:11 AM	Recipe started at 12:45 AM
3/19/2011	12:45:12 AM	Helium valve closed
3/19/2011	12:45:12 AM	H2 valve closed
3/19/2011	12:45:12 AM	BCl3 valve closed
3/19/2011	12:45:12 AM	PH3 valve closed
3/19/2011	12:45:12 AM	SiCl4 pre valve closed
3/19/2011	12:45:12 AM	SiCl4 post valve closed
3/19/2011	12:45:12 AM	Main Vac valve closed
3/19/2011	12:45:12 AM	Bypass valve closed
3/19/2011	12:45:12 AM	Bubbler valve closed
3/19/2011	12:45:12 AM	Helium MFC set to  0.000000
3/19/2011	12:45:12 AM	H2 MFC set to  0.000000
3/19/2011	12:45:12 AM	BCl3 MFC set to  0.000000
3/19/2011	12:45:12 AM	PHl3 MFC set to  0.000000
3/19/2011	12:45:12 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:45:12 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:45:12 AM	Tube furnace set to 0
3/19/2011	12:45:12 AM	Run finished at 12:45 AM
3/19/2011	12:45:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/19/2011	12:45:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	12:45:34 AM	Recipe started at 12:45 AM
3/19/2011	12:45:34 AM	Helium valve closed
3/19/2011	12:45:34 AM	H2 valve closed
3/19/2011	12:45:34 AM	BCl3 valve closed
3/19/2011	12:45:34 AM	PH3 valve closed
3/19/2011	12:45:34 AM	SiCl4 pre valve closed
3/19/2011	12:45:34 AM	SiCl4 post valve closed
3/19/2011	12:45:34 AM	Main Vac valve closed
3/19/2011	12:45:34 AM	Bubbler valve closed
3/19/2011	12:45:34 AM	Bypass valve opened
3/19/2011	12:45:34 AM	Helium MFC set to  0.000000
3/19/2011	12:45:34 AM	H2 MFC set to  0.000000
3/19/2011	12:45:34 AM	BCl3 MFC set to  0.000000
3/19/2011	12:45:34 AM	PHl3 MFC set to  0.000000
3/19/2011	12:45:34 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:45:34 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:45:34 AM	Tube furnace set to 0
3/19/2011	12:45:35 AM	Helium valve closed
3/19/2011	12:45:35 AM	H2 valve closed
3/19/2011	12:45:35 AM	BCl3 valve closed
3/19/2011	12:45:35 AM	PH3 valve closed
3/19/2011	12:45:35 AM	SiCl4 pre valve closed
3/19/2011	12:45:35 AM	SiCl4 post valve closed
3/19/2011	12:45:35 AM	Bubbler valve closed
3/19/2011	12:45:35 AM	Main Vac valve opened
3/19/2011	12:45:35 AM	Bypass valve opened
3/19/2011	12:45:35 AM	Helium MFC set to  0.000000
3/19/2011	12:45:35 AM	H2 MFC set to  0.000000
3/19/2011	12:45:35 AM	BCl3 MFC set to  0.000000
3/19/2011	12:45:35 AM	PHl3 MFC set to  0.000000
3/19/2011	12:45:35 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:45:35 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:45:35 AM	Tube furnace set to 0
3/19/2011	12:45:35 AM	Run finished at 12:45 AM
3/19/2011	12:45:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	12:45:42 AM	Helium MFC set to  50.000000
3/19/2011	12:45:43 AM	Helium valve opened
3/19/2011	12:46:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	12:46:18 AM	Recipe started at 12:46 AM
3/19/2011	12:46:18 AM	Helium valve closed
3/19/2011	12:46:18 AM	H2 valve closed
3/19/2011	12:46:18 AM	BCl3 valve closed
3/19/2011	12:46:18 AM	PH3 valve closed
3/19/2011	12:46:18 AM	SiCl4 pre valve closed
3/19/2011	12:46:18 AM	SiCl4 post valve closed
3/19/2011	12:46:18 AM	Main Vac valve closed
3/19/2011	12:46:18 AM	Bubbler valve closed
3/19/2011	12:46:18 AM	Bypass valve opened
3/19/2011	12:46:18 AM	Helium MFC set to  0.000000
3/19/2011	12:46:18 AM	H2 MFC set to  0.000000
3/19/2011	12:46:18 AM	BCl3 MFC set to  0.000000
3/19/2011	12:46:18 AM	PHl3 MFC set to  0.000000
3/19/2011	12:46:18 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:46:18 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:46:18 AM	Tube furnace set to 0
3/19/2011	12:46:18 AM	Helium valve closed
3/19/2011	12:46:18 AM	H2 valve closed
3/19/2011	12:46:18 AM	BCl3 valve closed
3/19/2011	12:46:18 AM	PH3 valve closed
3/19/2011	12:46:18 AM	SiCl4 pre valve closed
3/19/2011	12:46:18 AM	SiCl4 post valve closed
3/19/2011	12:46:18 AM	Bubbler valve closed
3/19/2011	12:46:18 AM	Main Vac valve opened
3/19/2011	12:46:18 AM	Bypass valve opened
3/19/2011	12:46:18 AM	Helium MFC set to  0.000000
3/19/2011	12:46:18 AM	H2 MFC set to  0.000000
3/19/2011	12:46:18 AM	BCl3 MFC set to  0.000000
3/19/2011	12:46:18 AM	PHl3 MFC set to  0.000000
3/19/2011	12:46:18 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:46:18 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:46:18 AM	Tube furnace set to 0
3/19/2011	12:46:19 AM	Run finished at 12:46 AM
3/19/2011	12:46:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	12:46:59 AM	Recipe started at 12:46 AM
3/19/2011	12:47:00 AM	Helium valve closed
3/19/2011	12:47:00 AM	BCl3 valve closed
3/19/2011	12:47:00 AM	PH3 valve closed
3/19/2011	12:47:00 AM	SiCl4 pre valve closed
3/19/2011	12:47:00 AM	SiCl4 post valve closed
3/19/2011	12:47:00 AM	Main Vac valve closed
3/19/2011	12:47:00 AM	Bypass valve closed
3/19/2011	12:47:00 AM	Bubbler valve closed
3/19/2011	12:47:00 AM	H2 valve opened
3/19/2011	12:47:00 AM	Helium MFC set to  0.000000
3/19/2011	12:47:00 AM	H2 MFC set to  500.000000
3/19/2011	12:47:00 AM	BCl3 MFC set to  0.000000
3/19/2011	12:47:00 AM	PHl3 MFC set to  0.000000
3/19/2011	12:47:00 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:47:00 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:47:00 AM	Tube furnace set to 0
3/19/2011	12:48:17 AM	Helium valve closed
3/19/2011	12:48:17 AM	BCl3 valve closed
3/19/2011	12:48:17 AM	PH3 valve closed
3/19/2011	12:48:17 AM	SiCl4 pre valve closed
3/19/2011	12:48:17 AM	SiCl4 post valve closed
3/19/2011	12:48:17 AM	Main Vac valve closed
3/19/2011	12:48:17 AM	Bypass valve closed
3/19/2011	12:48:17 AM	H2 valve opened
3/19/2011	12:48:17 AM	Bubbler valve opened
3/19/2011	12:48:17 AM	Helium MFC set to  0.000000
3/19/2011	12:48:17 AM	H2 MFC set to  500.000000
3/19/2011	12:48:17 AM	BCl3 MFC set to  0.000000
3/19/2011	12:48:17 AM	PHl3 MFC set to  0.000000
3/19/2011	12:48:17 AM	SiCl4 MFC set to  0.000000
3/19/2011	12:48:17 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:48:17 AM	Tube furnace set to 1000
3/19/2011	1:08:17 AM	Helium valve closed
3/19/2011	1:08:17 AM	PH3 valve closed
3/19/2011	1:08:17 AM	Main Vac valve closed
3/19/2011	1:08:17 AM	Bypass valve closed
3/19/2011	1:08:17 AM	H2 valve opened
3/19/2011	1:08:17 AM	BCl3 valve opened
3/19/2011	1:08:17 AM	SiCl4 pre valve opened
3/19/2011	1:08:17 AM	SiCl4 post valve opened
3/19/2011	1:08:17 AM	Bubbler valve opened
3/19/2011	1:08:17 AM	Helium MFC set to  0.000000
3/19/2011	1:08:17 AM	H2 MFC set to  500.000000
3/19/2011	1:08:17 AM	BCl3 MFC set to  3.000000
3/19/2011	1:08:17 AM	PHl3 MFC set to  0.000000
3/19/2011	1:08:17 AM	SiCl4 MFC set to  60.000000
3/19/2011	1:08:17 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	1:08:17 AM	Tube furnace set to 1000
3/19/2011	1:28:17 AM	H2 valve closed
3/19/2011	1:28:17 AM	BCl3 valve closed
3/19/2011	1:28:17 AM	PH3 valve closed
3/19/2011	1:28:17 AM	SiCl4 pre valve closed
3/19/2011	1:28:17 AM	SiCl4 post valve closed
3/19/2011	1:28:17 AM	Main Vac valve closed
3/19/2011	1:28:17 AM	Bypass valve closed
3/19/2011	1:28:17 AM	Helium valve opened
3/19/2011	1:28:17 AM	Bubbler valve opened
3/19/2011	1:28:17 AM	Helium MFC set to  500.000000
3/19/2011	1:28:17 AM	H2 MFC set to  0.000000
3/19/2011	1:28:17 AM	BCl3 MFC set to  0.000000
3/19/2011	1:28:17 AM	PHl3 MFC set to  0.000000
3/19/2011	1:28:17 AM	SiCl4 MFC set to  0.000000
3/19/2011	1:28:17 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	1:28:17 AM	Tube furnace set to 0
3/19/2011	1:48:17 AM	Helium valve closed
3/19/2011	1:48:17 AM	H2 valve closed
3/19/2011	1:48:17 AM	BCl3 valve closed
3/19/2011	1:48:17 AM	PH3 valve closed
3/19/2011	1:48:17 AM	SiCl4 pre valve closed
3/19/2011	1:48:17 AM	SiCl4 post valve closed
3/19/2011	1:48:17 AM	Main Vac valve closed
3/19/2011	1:48:17 AM	Bypass valve closed
3/19/2011	1:48:17 AM	Bubbler valve closed
3/19/2011	1:48:17 AM	Helium MFC set to  0.000000
3/19/2011	1:48:17 AM	H2 MFC set to  0.000000
3/19/2011	1:48:17 AM	BCl3 MFC set to  0.000000
3/19/2011	1:48:17 AM	PHl3 MFC set to  0.000000
3/19/2011	1:48:17 AM	SiCl4 MFC set to  0.000000
3/19/2011	1:48:17 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	1:48:18 AM	Tube furnace set to 0
3/19/2011	1:48:18 AM	Run finished at 1:48 AM
3/19/2011	1:59:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2011	1:59:27 AM	Recipe started at 1:59 AM
3/19/2011	1:59:27 AM	H2 valve closed
3/19/2011	1:59:27 AM	BCl3 valve closed
3/19/2011	1:59:27 AM	PH3 valve closed
3/19/2011	1:59:27 AM	SiCl4 pre valve closed
3/19/2011	1:59:27 AM	SiCl4 post valve closed
3/19/2011	1:59:27 AM	Main Vac valve closed
3/19/2011	1:59:27 AM	Bypass valve closed
3/19/2011	1:59:27 AM	Bubbler valve closed
3/19/2011	1:59:27 AM	Helium valve opened
3/19/2011	1:59:27 AM	Helium MFC set to  500.000000
3/19/2011	1:59:27 AM	H2 MFC set to  0.000000
3/19/2011	1:59:27 AM	BCl3 MFC set to  0.000000
3/19/2011	1:59:27 AM	PHl3 MFC set to  0.000000
3/19/2011	1:59:27 AM	SiCl4 MFC set to  0.000000
3/19/2011	1:59:27 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	1:59:27 AM	Tube furnace set to 0
3/19/2011	1:59:33 AM	Helium valve closed
3/19/2011	1:59:33 AM	H2 valve closed
3/19/2011	1:59:33 AM	BCl3 valve closed
3/19/2011	1:59:33 AM	PH3 valve closed
3/19/2011	1:59:33 AM	SiCl4 pre valve closed
3/19/2011	1:59:33 AM	SiCl4 post valve closed
3/19/2011	1:59:33 AM	Main Vac valve closed
3/19/2011	1:59:33 AM	Bypass valve closed
3/19/2011	1:59:33 AM	Bubbler valve closed
3/19/2011	1:59:33 AM	Helium MFC set to  0.000000
3/19/2011	1:59:33 AM	H2 MFC set to  0.000000
3/19/2011	1:59:33 AM	BCl3 MFC set to  0.000000
3/19/2011	1:59:33 AM	PHl3 MFC set to  0.000000
3/19/2011	1:59:33 AM	SiCl4 MFC set to  0.000000
3/19/2011	1:59:33 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	1:59:34 AM	Tube furnace set to 0
3/19/2011	1:59:34 AM	Run finished at 1:59 AM
3/19/2011	1:59:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2011	2:03:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	2:03:07 AM	Recipe started at 2:03 AM
3/19/2011	2:03:07 AM	Helium valve closed
3/19/2011	2:03:07 AM	H2 valve closed
3/19/2011	2:03:07 AM	BCl3 valve closed
3/19/2011	2:03:07 AM	PH3 valve closed
3/19/2011	2:03:07 AM	SiCl4 pre valve closed
3/19/2011	2:03:07 AM	SiCl4 post valve closed
3/19/2011	2:03:07 AM	Main Vac valve closed
3/19/2011	2:03:07 AM	Bubbler valve closed
3/19/2011	2:03:07 AM	Bypass valve opened
3/19/2011	2:03:07 AM	Helium MFC set to  0.000000
3/19/2011	2:03:07 AM	H2 MFC set to  0.000000
3/19/2011	2:03:07 AM	BCl3 MFC set to  0.000000
3/19/2011	2:03:07 AM	PHl3 MFC set to  0.000000
3/19/2011	2:03:07 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:03:07 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:03:07 AM	Tube furnace set to 0
3/19/2011	2:03:39 AM	Helium valve closed
3/19/2011	2:03:39 AM	H2 valve closed
3/19/2011	2:03:39 AM	BCl3 valve closed
3/19/2011	2:03:39 AM	PH3 valve closed
3/19/2011	2:03:39 AM	SiCl4 pre valve closed
3/19/2011	2:03:39 AM	SiCl4 post valve closed
3/19/2011	2:03:39 AM	Bubbler valve closed
3/19/2011	2:03:39 AM	Main Vac valve opened
3/19/2011	2:03:39 AM	Bypass valve opened
3/19/2011	2:03:39 AM	Helium MFC set to  0.000000
3/19/2011	2:03:39 AM	H2 MFC set to  0.000000
3/19/2011	2:03:39 AM	BCl3 MFC set to  0.000000
3/19/2011	2:03:39 AM	PHl3 MFC set to  0.000000
3/19/2011	2:03:39 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:03:39 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:03:39 AM	Tube furnace set to 0
3/19/2011	2:03:39 AM	Run finished at 2:03 AM
3/19/2011	2:03:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	2:04:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/19/2011	2:04:41 AM	Recipe started at 2:04 AM
3/19/2011	2:04:41 AM	Helium valve closed
3/19/2011	2:04:41 AM	H2 valve closed
3/19/2011	2:04:41 AM	BCl3 valve closed
3/19/2011	2:04:41 AM	PH3 valve closed
3/19/2011	2:04:41 AM	SiCl4 pre valve closed
3/19/2011	2:04:41 AM	SiCl4 post valve closed
3/19/2011	2:04:41 AM	Main Vac valve closed
3/19/2011	2:04:41 AM	Bubbler valve closed
3/19/2011	2:04:41 AM	Bypass valve opened
3/19/2011	2:04:41 AM	Helium MFC set to  0.000000
3/19/2011	2:04:41 AM	H2 MFC set to  0.000000
3/19/2011	2:04:41 AM	BCl3 MFC set to  0.000000
3/19/2011	2:04:41 AM	PHl3 MFC set to  0.000000
3/19/2011	2:04:41 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:04:41 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:04:41 AM	Tube furnace set to 0
3/19/2011	2:04:42 AM	Helium valve closed
3/19/2011	2:04:42 AM	H2 valve closed
3/19/2011	2:04:42 AM	BCl3 valve closed
3/19/2011	2:04:42 AM	PH3 valve closed
3/19/2011	2:04:42 AM	SiCl4 pre valve closed
3/19/2011	2:04:42 AM	SiCl4 post valve closed
3/19/2011	2:04:42 AM	Bubbler valve closed
3/19/2011	2:04:42 AM	Main Vac valve opened
3/19/2011	2:04:42 AM	Bypass valve opened
3/19/2011	2:04:42 AM	Helium MFC set to  0.000000
3/19/2011	2:04:42 AM	H2 MFC set to  0.000000
3/19/2011	2:04:42 AM	BCl3 MFC set to  0.000000
3/19/2011	2:04:42 AM	PHl3 MFC set to  0.000000
3/19/2011	2:04:42 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:04:42 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:04:42 AM	Tube furnace set to 0
3/19/2011	2:05:42 AM	H2 valve closed
3/19/2011	2:05:42 AM	BCl3 valve closed
3/19/2011	2:05:42 AM	PH3 valve closed
3/19/2011	2:05:42 AM	SiCl4 pre valve closed
3/19/2011	2:05:42 AM	SiCl4 post valve closed
3/19/2011	2:05:42 AM	Bubbler valve closed
3/19/2011	2:05:42 AM	Helium valve opened
3/19/2011	2:05:42 AM	Main Vac valve opened
3/19/2011	2:05:42 AM	Bypass valve opened
3/19/2011	2:05:42 AM	Helium MFC set to  100.000000
3/19/2011	2:05:42 AM	H2 MFC set to  0.000000
3/19/2011	2:05:42 AM	BCl3 MFC set to  0.000000
3/19/2011	2:05:42 AM	PHl3 MFC set to  0.000000
3/19/2011	2:05:42 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:05:42 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:05:42 AM	Tube furnace set to 0
3/19/2011	2:06:42 AM	Helium valve closed
3/19/2011	2:06:42 AM	H2 valve closed
3/19/2011	2:06:42 AM	BCl3 valve closed
3/19/2011	2:06:42 AM	PH3 valve closed
3/19/2011	2:06:42 AM	SiCl4 pre valve closed
3/19/2011	2:06:42 AM	SiCl4 post valve closed
3/19/2011	2:06:42 AM	Bubbler valve closed
3/19/2011	2:06:42 AM	Main Vac valve opened
3/19/2011	2:06:42 AM	Bypass valve opened
3/19/2011	2:06:42 AM	Helium MFC set to  0.000000
3/19/2011	2:06:42 AM	H2 MFC set to  0.000000
3/19/2011	2:06:42 AM	BCl3 MFC set to  0.000000
3/19/2011	2:06:42 AM	PHl3 MFC set to  0.000000
3/19/2011	2:06:42 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:06:42 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:06:42 AM	Tube furnace set to 0
3/19/2011	2:07:42 AM	H2 valve closed
3/19/2011	2:07:42 AM	BCl3 valve closed
3/19/2011	2:07:42 AM	PH3 valve closed
3/19/2011	2:07:42 AM	SiCl4 pre valve closed
3/19/2011	2:07:42 AM	SiCl4 post valve closed
3/19/2011	2:07:42 AM	Bubbler valve closed
3/19/2011	2:07:42 AM	Helium valve opened
3/19/2011	2:07:42 AM	Main Vac valve opened
3/19/2011	2:07:42 AM	Bypass valve opened
3/19/2011	2:07:42 AM	Helium MFC set to  100.000000
3/19/2011	2:07:42 AM	H2 MFC set to  0.000000
3/19/2011	2:07:42 AM	BCl3 MFC set to  0.000000
3/19/2011	2:07:42 AM	PHl3 MFC set to  0.000000
3/19/2011	2:07:42 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:07:42 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:07:42 AM	Tube furnace set to 0
3/19/2011	2:08:42 AM	Helium valve closed
3/19/2011	2:08:42 AM	H2 valve closed
3/19/2011	2:08:42 AM	BCl3 valve closed
3/19/2011	2:08:42 AM	PH3 valve closed
3/19/2011	2:08:42 AM	SiCl4 pre valve closed
3/19/2011	2:08:42 AM	SiCl4 post valve closed
3/19/2011	2:08:42 AM	Bubbler valve closed
3/19/2011	2:08:42 AM	Main Vac valve opened
3/19/2011	2:08:42 AM	Bypass valve opened
3/19/2011	2:08:42 AM	Helium MFC set to  0.000000
3/19/2011	2:08:42 AM	H2 MFC set to  0.000000
3/19/2011	2:08:42 AM	BCl3 MFC set to  0.000000
3/19/2011	2:08:42 AM	PHl3 MFC set to  0.000000
3/19/2011	2:08:42 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:08:42 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:08:43 AM	Tube furnace set to 0
3/19/2011	2:09:43 AM	H2 valve closed
3/19/2011	2:09:43 AM	BCl3 valve closed
3/19/2011	2:09:43 AM	PH3 valve closed
3/19/2011	2:09:43 AM	SiCl4 pre valve closed
3/19/2011	2:09:43 AM	SiCl4 post valve closed
3/19/2011	2:09:43 AM	Bubbler valve closed
3/19/2011	2:09:43 AM	Helium valve opened
3/19/2011	2:09:43 AM	Main Vac valve opened
3/19/2011	2:09:43 AM	Bypass valve opened
3/19/2011	2:09:43 AM	Helium MFC set to  100.000000
3/19/2011	2:09:43 AM	H2 MFC set to  0.000000
3/19/2011	2:09:43 AM	BCl3 MFC set to  0.000000
3/19/2011	2:09:43 AM	PHl3 MFC set to  0.000000
3/19/2011	2:09:43 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:09:43 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:09:43 AM	Tube furnace set to 0
3/19/2011	2:10:43 AM	Helium valve closed
3/19/2011	2:10:43 AM	H2 valve closed
3/19/2011	2:10:43 AM	BCl3 valve closed
3/19/2011	2:10:43 AM	PH3 valve closed
3/19/2011	2:10:43 AM	SiCl4 pre valve closed
3/19/2011	2:10:43 AM	SiCl4 post valve closed
3/19/2011	2:10:43 AM	Bubbler valve closed
3/19/2011	2:10:43 AM	Main Vac valve opened
3/19/2011	2:10:43 AM	Bypass valve opened
3/19/2011	2:10:43 AM	Helium MFC set to  0.000000
3/19/2011	2:10:43 AM	H2 MFC set to  0.000000
3/19/2011	2:10:43 AM	BCl3 MFC set to  0.000000
3/19/2011	2:10:43 AM	PHl3 MFC set to  0.000000
3/19/2011	2:10:43 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:10:43 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:10:43 AM	Tube furnace set to 0
3/19/2011	2:11:43 AM	H2 valve closed
3/19/2011	2:11:43 AM	BCl3 valve closed
3/19/2011	2:11:43 AM	PH3 valve closed
3/19/2011	2:11:43 AM	SiCl4 pre valve closed
3/19/2011	2:11:43 AM	SiCl4 post valve closed
3/19/2011	2:11:43 AM	Bubbler valve closed
3/19/2011	2:11:43 AM	Helium valve opened
3/19/2011	2:11:43 AM	Main Vac valve opened
3/19/2011	2:11:43 AM	Bypass valve opened
3/19/2011	2:11:43 AM	Helium MFC set to  100.000000
3/19/2011	2:11:43 AM	H2 MFC set to  0.000000
3/19/2011	2:11:43 AM	BCl3 MFC set to  0.000000
3/19/2011	2:11:43 AM	PHl3 MFC set to  0.000000
3/19/2011	2:11:43 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:11:43 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:11:43 AM	Tube furnace set to 0
3/19/2011	2:12:43 AM	Helium valve closed
3/19/2011	2:12:43 AM	H2 valve closed
3/19/2011	2:12:43 AM	BCl3 valve closed
3/19/2011	2:12:43 AM	PH3 valve closed
3/19/2011	2:12:43 AM	SiCl4 pre valve closed
3/19/2011	2:12:43 AM	SiCl4 post valve closed
3/19/2011	2:12:43 AM	Bubbler valve closed
3/19/2011	2:12:43 AM	Main Vac valve opened
3/19/2011	2:12:43 AM	Bypass valve opened
3/19/2011	2:12:43 AM	Helium MFC set to  0.000000
3/19/2011	2:12:43 AM	H2 MFC set to  0.000000
3/19/2011	2:12:43 AM	BCl3 MFC set to  0.000000
3/19/2011	2:12:43 AM	PHl3 MFC set to  0.000000
3/19/2011	2:12:43 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:12:43 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:12:43 AM	Tube furnace set to 0
3/19/2011	2:13:43 AM	H2 valve closed
3/19/2011	2:13:43 AM	BCl3 valve closed
3/19/2011	2:13:43 AM	PH3 valve closed
3/19/2011	2:13:43 AM	SiCl4 pre valve closed
3/19/2011	2:13:43 AM	SiCl4 post valve closed
3/19/2011	2:13:43 AM	Bubbler valve closed
3/19/2011	2:13:43 AM	Helium valve opened
3/19/2011	2:13:43 AM	Main Vac valve opened
3/19/2011	2:13:43 AM	Bypass valve opened
3/19/2011	2:13:43 AM	Helium MFC set to  100.000000
3/19/2011	2:13:43 AM	H2 MFC set to  0.000000
3/19/2011	2:13:43 AM	BCl3 MFC set to  0.000000
3/19/2011	2:13:43 AM	PHl3 MFC set to  0.000000
3/19/2011	2:13:43 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:13:43 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:13:44 AM	Tube furnace set to 0
3/19/2011	2:14:44 AM	Helium valve closed
3/19/2011	2:14:44 AM	H2 valve closed
3/19/2011	2:14:44 AM	BCl3 valve closed
3/19/2011	2:14:44 AM	PH3 valve closed
3/19/2011	2:14:44 AM	SiCl4 pre valve closed
3/19/2011	2:14:44 AM	SiCl4 post valve closed
3/19/2011	2:14:44 AM	Bubbler valve closed
3/19/2011	2:14:44 AM	Main Vac valve opened
3/19/2011	2:14:44 AM	Bypass valve opened
3/19/2011	2:14:44 AM	Helium MFC set to  0.000000
3/19/2011	2:14:44 AM	H2 MFC set to  0.000000
3/19/2011	2:14:44 AM	BCl3 MFC set to  0.000000
3/19/2011	2:14:44 AM	PHl3 MFC set to  0.000000
3/19/2011	2:14:44 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:14:44 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:14:44 AM	Tube furnace set to 0
3/19/2011	2:15:44 AM	H2 valve closed
3/19/2011	2:15:44 AM	BCl3 valve closed
3/19/2011	2:15:44 AM	PH3 valve closed
3/19/2011	2:15:44 AM	SiCl4 pre valve closed
3/19/2011	2:15:44 AM	SiCl4 post valve closed
3/19/2011	2:15:44 AM	Bubbler valve closed
3/19/2011	2:15:44 AM	Helium valve opened
3/19/2011	2:15:44 AM	Main Vac valve opened
3/19/2011	2:15:44 AM	Bypass valve opened
3/19/2011	2:15:44 AM	Helium MFC set to  100.000000
3/19/2011	2:15:44 AM	H2 MFC set to  0.000000
3/19/2011	2:15:44 AM	BCl3 MFC set to  0.000000
3/19/2011	2:15:44 AM	PHl3 MFC set to  0.000000
3/19/2011	2:15:44 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:15:44 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:15:44 AM	Tube furnace set to 0
3/19/2011	2:16:44 AM	Helium valve closed
3/19/2011	2:16:44 AM	H2 valve closed
3/19/2011	2:16:44 AM	BCl3 valve closed
3/19/2011	2:16:44 AM	PH3 valve closed
3/19/2011	2:16:44 AM	SiCl4 pre valve closed
3/19/2011	2:16:44 AM	SiCl4 post valve closed
3/19/2011	2:16:44 AM	Bubbler valve closed
3/19/2011	2:16:44 AM	Main Vac valve opened
3/19/2011	2:16:44 AM	Bypass valve opened
3/19/2011	2:16:44 AM	Helium MFC set to  0.000000
3/19/2011	2:16:44 AM	H2 MFC set to  0.000000
3/19/2011	2:16:44 AM	BCl3 MFC set to  0.000000
3/19/2011	2:16:44 AM	PHl3 MFC set to  0.000000
3/19/2011	2:16:44 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:16:44 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:16:44 AM	Tube furnace set to 0
3/19/2011	2:17:44 AM	H2 valve closed
3/19/2011	2:17:44 AM	BCl3 valve closed
3/19/2011	2:17:44 AM	PH3 valve closed
3/19/2011	2:17:44 AM	SiCl4 pre valve closed
3/19/2011	2:17:44 AM	SiCl4 post valve closed
3/19/2011	2:17:44 AM	Bubbler valve closed
3/19/2011	2:17:44 AM	Helium valve opened
3/19/2011	2:17:44 AM	Main Vac valve opened
3/19/2011	2:17:44 AM	Bypass valve opened
3/19/2011	2:17:44 AM	Helium MFC set to  100.000000
3/19/2011	2:17:44 AM	H2 MFC set to  0.000000
3/19/2011	2:17:44 AM	BCl3 MFC set to  0.000000
3/19/2011	2:17:44 AM	PHl3 MFC set to  0.000000
3/19/2011	2:17:44 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:17:44 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:17:44 AM	Tube furnace set to 0
3/19/2011	2:18:44 AM	Helium valve closed
3/19/2011	2:18:44 AM	H2 valve closed
3/19/2011	2:18:44 AM	BCl3 valve closed
3/19/2011	2:18:44 AM	PH3 valve closed
3/19/2011	2:18:44 AM	SiCl4 pre valve closed
3/19/2011	2:18:44 AM	SiCl4 post valve closed
3/19/2011	2:18:44 AM	Bubbler valve closed
3/19/2011	2:18:44 AM	Main Vac valve opened
3/19/2011	2:18:44 AM	Bypass valve opened
3/19/2011	2:18:44 AM	Helium MFC set to  0.000000
3/19/2011	2:18:44 AM	H2 MFC set to  0.000000
3/19/2011	2:18:44 AM	BCl3 MFC set to  0.000000
3/19/2011	2:18:44 AM	PHl3 MFC set to  0.000000
3/19/2011	2:18:44 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:18:44 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:18:45 AM	Tube furnace set to 0
3/19/2011	2:19:45 AM	H2 valve closed
3/19/2011	2:19:45 AM	BCl3 valve closed
3/19/2011	2:19:45 AM	PH3 valve closed
3/19/2011	2:19:45 AM	SiCl4 pre valve closed
3/19/2011	2:19:45 AM	SiCl4 post valve closed
3/19/2011	2:19:45 AM	Bubbler valve closed
3/19/2011	2:19:45 AM	Helium valve opened
3/19/2011	2:19:45 AM	Main Vac valve opened
3/19/2011	2:19:45 AM	Bypass valve opened
3/19/2011	2:19:45 AM	Helium MFC set to  100.000000
3/19/2011	2:19:45 AM	H2 MFC set to  0.000000
3/19/2011	2:19:45 AM	BCl3 MFC set to  0.000000
3/19/2011	2:19:45 AM	PHl3 MFC set to  0.000000
3/19/2011	2:19:45 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:19:45 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:19:45 AM	Tube furnace set to 0
3/19/2011	2:20:45 AM	Helium valve closed
3/19/2011	2:20:45 AM	H2 valve closed
3/19/2011	2:20:45 AM	BCl3 valve closed
3/19/2011	2:20:45 AM	PH3 valve closed
3/19/2011	2:20:45 AM	SiCl4 pre valve closed
3/19/2011	2:20:45 AM	SiCl4 post valve closed
3/19/2011	2:20:45 AM	Bubbler valve closed
3/19/2011	2:20:45 AM	Main Vac valve opened
3/19/2011	2:20:45 AM	Bypass valve opened
3/19/2011	2:20:45 AM	Helium MFC set to  0.000000
3/19/2011	2:20:45 AM	H2 MFC set to  0.000000
3/19/2011	2:20:45 AM	BCl3 MFC set to  0.000000
3/19/2011	2:20:45 AM	PHl3 MFC set to  0.000000
3/19/2011	2:20:45 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:20:45 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:20:45 AM	Tube furnace set to 0
3/19/2011	2:21:45 AM	H2 valve closed
3/19/2011	2:21:45 AM	BCl3 valve closed
3/19/2011	2:21:45 AM	PH3 valve closed
3/19/2011	2:21:45 AM	SiCl4 pre valve closed
3/19/2011	2:21:45 AM	SiCl4 post valve closed
3/19/2011	2:21:45 AM	Bubbler valve closed
3/19/2011	2:21:45 AM	Helium valve opened
3/19/2011	2:21:45 AM	Main Vac valve opened
3/19/2011	2:21:45 AM	Bypass valve opened
3/19/2011	2:21:45 AM	Helium MFC set to  100.000000
3/19/2011	2:21:45 AM	H2 MFC set to  0.000000
3/19/2011	2:21:45 AM	BCl3 MFC set to  0.000000
3/19/2011	2:21:45 AM	PHl3 MFC set to  0.000000
3/19/2011	2:21:45 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:21:45 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:21:45 AM	Tube furnace set to 0
3/19/2011	2:22:45 AM	Helium valve closed
3/19/2011	2:22:45 AM	H2 valve closed
3/19/2011	2:22:45 AM	BCl3 valve closed
3/19/2011	2:22:45 AM	PH3 valve closed
3/19/2011	2:22:45 AM	SiCl4 pre valve closed
3/19/2011	2:22:45 AM	SiCl4 post valve closed
3/19/2011	2:22:45 AM	Bubbler valve closed
3/19/2011	2:22:45 AM	Main Vac valve opened
3/19/2011	2:22:45 AM	Bypass valve opened
3/19/2011	2:22:45 AM	Helium MFC set to  0.000000
3/19/2011	2:22:45 AM	H2 MFC set to  0.000000
3/19/2011	2:22:45 AM	BCl3 MFC set to  0.000000
3/19/2011	2:22:45 AM	PHl3 MFC set to  0.000000
3/19/2011	2:22:45 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:22:45 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:22:45 AM	Tube furnace set to 0
3/19/2011	2:23:45 AM	H2 valve closed
3/19/2011	2:23:45 AM	BCl3 valve closed
3/19/2011	2:23:45 AM	PH3 valve closed
3/19/2011	2:23:45 AM	SiCl4 pre valve closed
3/19/2011	2:23:45 AM	SiCl4 post valve closed
3/19/2011	2:23:45 AM	Bubbler valve closed
3/19/2011	2:23:45 AM	Helium valve opened
3/19/2011	2:23:45 AM	Main Vac valve opened
3/19/2011	2:23:45 AM	Bypass valve opened
3/19/2011	2:23:45 AM	Helium MFC set to  100.000000
3/19/2011	2:23:45 AM	H2 MFC set to  0.000000
3/19/2011	2:23:45 AM	BCl3 MFC set to  0.000000
3/19/2011	2:23:45 AM	PHl3 MFC set to  0.000000
3/19/2011	2:23:45 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:23:45 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:23:46 AM	Tube furnace set to 0
3/19/2011	2:24:46 AM	Helium valve closed
3/19/2011	2:24:46 AM	H2 valve closed
3/19/2011	2:24:46 AM	BCl3 valve closed
3/19/2011	2:24:46 AM	PH3 valve closed
3/19/2011	2:24:46 AM	SiCl4 pre valve closed
3/19/2011	2:24:46 AM	SiCl4 post valve closed
3/19/2011	2:24:46 AM	Bubbler valve closed
3/19/2011	2:24:46 AM	Main Vac valve opened
3/19/2011	2:24:46 AM	Bypass valve opened
3/19/2011	2:24:46 AM	Helium MFC set to  0.000000
3/19/2011	2:24:46 AM	H2 MFC set to  0.000000
3/19/2011	2:24:46 AM	BCl3 MFC set to  0.000000
3/19/2011	2:24:46 AM	PHl3 MFC set to  0.000000
3/19/2011	2:24:46 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:24:46 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:24:46 AM	Tube furnace set to 0
3/19/2011	2:24:47 AM	Run finished at 2:24 AM
3/19/2011	2:24:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/19/2011	2:25:32 AM	Helium MFC set to  100.000000
3/19/2011	2:25:33 AM	Helium valve opened
3/19/2011	2:26:27 AM	Helium MFC set to  0.000000
3/19/2011	2:26:31 AM	Helium valve closed
3/19/2011	2:27:09 AM	Recipe started at 2:27 AM
3/19/2011	2:27:09 AM	Helium valve closed
3/19/2011	2:27:09 AM	BCl3 valve closed
3/19/2011	2:27:09 AM	PH3 valve closed
3/19/2011	2:27:09 AM	SiCl4 pre valve closed
3/19/2011	2:27:09 AM	SiCl4 post valve closed
3/19/2011	2:27:09 AM	Main Vac valve closed
3/19/2011	2:27:09 AM	Bypass valve closed
3/19/2011	2:27:09 AM	Bubbler valve closed
3/19/2011	2:27:09 AM	H2 valve opened
3/19/2011	2:27:09 AM	Helium MFC set to  0.000000
3/19/2011	2:27:09 AM	H2 MFC set to  500.000000
3/19/2011	2:27:09 AM	BCl3 MFC set to  0.000000
3/19/2011	2:27:09 AM	PHl3 MFC set to  0.000000
3/19/2011	2:27:09 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:27:09 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:27:09 AM	Tube furnace set to 0
3/19/2011	2:28:26 AM	Helium valve closed
3/19/2011	2:28:26 AM	BCl3 valve closed
3/19/2011	2:28:26 AM	PH3 valve closed
3/19/2011	2:28:26 AM	SiCl4 pre valve closed
3/19/2011	2:28:26 AM	SiCl4 post valve closed
3/19/2011	2:28:26 AM	Main Vac valve closed
3/19/2011	2:28:26 AM	Bypass valve closed
3/19/2011	2:28:26 AM	H2 valve opened
3/19/2011	2:28:26 AM	Bubbler valve opened
3/19/2011	2:28:26 AM	Helium MFC set to  0.000000
3/19/2011	2:28:26 AM	H2 MFC set to  500.000000
3/19/2011	2:28:26 AM	BCl3 MFC set to  0.000000
3/19/2011	2:28:26 AM	PHl3 MFC set to  0.000000
3/19/2011	2:28:26 AM	SiCl4 MFC set to  0.000000
3/19/2011	2:28:26 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:28:26 AM	Tube furnace set to 1000
3/19/2011	2:46:46 AM	Helium valve closed
3/19/2011	2:46:46 AM	PH3 valve closed
3/19/2011	2:46:46 AM	Main Vac valve closed
3/19/2011	2:46:46 AM	Bypass valve closed
3/19/2011	2:46:46 AM	H2 valve opened
3/19/2011	2:46:46 AM	BCl3 valve opened
3/19/2011	2:46:46 AM	SiCl4 pre valve opened
3/19/2011	2:46:46 AM	SiCl4 post valve opened
3/19/2011	2:46:46 AM	Bubbler valve opened
3/19/2011	2:46:46 AM	Helium MFC set to  0.000000
3/19/2011	2:46:46 AM	H2 MFC set to  500.000000
3/19/2011	2:46:46 AM	BCl3 MFC set to  3.000000
3/19/2011	2:46:46 AM	PHl3 MFC set to  0.000000
3/19/2011	2:46:46 AM	SiCl4 MFC set to  60.000000
3/19/2011	2:46:46 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:46:46 AM	Tube furnace set to 1000
3/19/2011	3:06:46 AM	H2 valve closed
3/19/2011	3:06:46 AM	BCl3 valve closed
3/19/2011	3:06:46 AM	PH3 valve closed
3/19/2011	3:06:46 AM	SiCl4 pre valve closed
3/19/2011	3:06:46 AM	SiCl4 post valve closed
3/19/2011	3:06:46 AM	Main Vac valve closed
3/19/2011	3:06:46 AM	Bypass valve closed
3/19/2011	3:06:46 AM	Helium valve opened
3/19/2011	3:06:46 AM	Bubbler valve opened
3/19/2011	3:06:46 AM	Helium MFC set to  500.000000
3/19/2011	3:06:46 AM	H2 MFC set to  0.000000
3/19/2011	3:06:46 AM	BCl3 MFC set to  0.000000
3/19/2011	3:06:46 AM	PHl3 MFC set to  0.000000
3/19/2011	3:06:47 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:06:47 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:06:47 AM	Tube furnace set to 0
3/19/2011	3:26:47 AM	Helium valve closed
3/19/2011	3:26:47 AM	H2 valve closed
3/19/2011	3:26:47 AM	BCl3 valve closed
3/19/2011	3:26:47 AM	PH3 valve closed
3/19/2011	3:26:47 AM	SiCl4 pre valve closed
3/19/2011	3:26:47 AM	SiCl4 post valve closed
3/19/2011	3:26:47 AM	Main Vac valve closed
3/19/2011	3:26:47 AM	Bypass valve closed
3/19/2011	3:26:47 AM	Bubbler valve closed
3/19/2011	3:26:47 AM	Helium MFC set to  0.000000
3/19/2011	3:26:47 AM	H2 MFC set to  0.000000
3/19/2011	3:26:47 AM	BCl3 MFC set to  0.000000
3/19/2011	3:26:47 AM	PHl3 MFC set to  0.000000
3/19/2011	3:26:47 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:26:47 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:26:47 AM	Tube furnace set to 0
3/19/2011	3:26:47 AM	Run finished at 3:26 AM
3/19/2011	3:38:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2011	3:38:04 AM	Recipe started at 3:38 AM
3/19/2011	3:38:04 AM	H2 valve closed
3/19/2011	3:38:04 AM	BCl3 valve closed
3/19/2011	3:38:04 AM	PH3 valve closed
3/19/2011	3:38:04 AM	SiCl4 pre valve closed
3/19/2011	3:38:04 AM	SiCl4 post valve closed
3/19/2011	3:38:04 AM	Main Vac valve closed
3/19/2011	3:38:04 AM	Bypass valve closed
3/19/2011	3:38:04 AM	Bubbler valve closed
3/19/2011	3:38:04 AM	Helium valve opened
3/19/2011	3:38:04 AM	Helium MFC set to  500.000000
3/19/2011	3:38:04 AM	H2 MFC set to  0.000000
3/19/2011	3:38:04 AM	BCl3 MFC set to  0.000000
3/19/2011	3:38:04 AM	PHl3 MFC set to  0.000000
3/19/2011	3:38:04 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:38:04 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:38:04 AM	Tube furnace set to 0
3/19/2011	3:38:08 AM	Helium valve closed
3/19/2011	3:38:08 AM	H2 valve closed
3/19/2011	3:38:08 AM	BCl3 valve closed
3/19/2011	3:38:08 AM	PH3 valve closed
3/19/2011	3:38:08 AM	SiCl4 pre valve closed
3/19/2011	3:38:08 AM	SiCl4 post valve closed
3/19/2011	3:38:08 AM	Main Vac valve closed
3/19/2011	3:38:08 AM	Bypass valve closed
3/19/2011	3:38:08 AM	Bubbler valve closed
3/19/2011	3:38:08 AM	Helium MFC set to  0.000000
3/19/2011	3:38:08 AM	H2 MFC set to  0.000000
3/19/2011	3:38:08 AM	BCl3 MFC set to  0.000000
3/19/2011	3:38:08 AM	PHl3 MFC set to  0.000000
3/19/2011	3:38:08 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:38:08 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:38:08 AM	Tube furnace set to 0
3/19/2011	3:38:09 AM	Run finished at 3:38 AM
3/19/2011	3:38:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2011	3:41:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	3:41:36 AM	Recipe started at 3:41 AM
3/19/2011	3:41:36 AM	Helium valve closed
3/19/2011	3:41:36 AM	H2 valve closed
3/19/2011	3:41:36 AM	BCl3 valve closed
3/19/2011	3:41:36 AM	PH3 valve closed
3/19/2011	3:41:36 AM	SiCl4 pre valve closed
3/19/2011	3:41:36 AM	SiCl4 post valve closed
3/19/2011	3:41:36 AM	Main Vac valve closed
3/19/2011	3:41:36 AM	Bubbler valve closed
3/19/2011	3:41:36 AM	Bypass valve opened
3/19/2011	3:41:36 AM	Helium MFC set to  0.000000
3/19/2011	3:41:36 AM	H2 MFC set to  0.000000
3/19/2011	3:41:36 AM	BCl3 MFC set to  0.000000
3/19/2011	3:41:36 AM	PHl3 MFC set to  0.000000
3/19/2011	3:41:36 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:41:36 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:41:36 AM	Tube furnace set to 0
3/19/2011	3:42:09 AM	Helium valve closed
3/19/2011	3:42:09 AM	H2 valve closed
3/19/2011	3:42:09 AM	BCl3 valve closed
3/19/2011	3:42:09 AM	PH3 valve closed
3/19/2011	3:42:09 AM	SiCl4 pre valve closed
3/19/2011	3:42:09 AM	SiCl4 post valve closed
3/19/2011	3:42:09 AM	Bubbler valve closed
3/19/2011	3:42:09 AM	Main Vac valve opened
3/19/2011	3:42:09 AM	Bypass valve opened
3/19/2011	3:42:09 AM	Helium MFC set to  0.000000
3/19/2011	3:42:09 AM	H2 MFC set to  0.000000
3/19/2011	3:42:09 AM	BCl3 MFC set to  0.000000
3/19/2011	3:42:09 AM	PHl3 MFC set to  0.000000
3/19/2011	3:42:09 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:42:09 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:42:09 AM	Tube furnace set to 0
3/19/2011	3:42:09 AM	Run finished at 3:42 AM
3/19/2011	3:42:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	3:43:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/19/2011	3:43:21 AM	Recipe started at 3:43 AM
3/19/2011	3:43:21 AM	Helium valve closed
3/19/2011	3:43:21 AM	H2 valve closed
3/19/2011	3:43:21 AM	BCl3 valve closed
3/19/2011	3:43:21 AM	PH3 valve closed
3/19/2011	3:43:21 AM	SiCl4 pre valve closed
3/19/2011	3:43:21 AM	SiCl4 post valve closed
3/19/2011	3:43:21 AM	Main Vac valve closed
3/19/2011	3:43:21 AM	Bubbler valve closed
3/19/2011	3:43:21 AM	Bypass valve opened
3/19/2011	3:43:21 AM	Helium MFC set to  0.000000
3/19/2011	3:43:21 AM	H2 MFC set to  0.000000
3/19/2011	3:43:21 AM	BCl3 MFC set to  0.000000
3/19/2011	3:43:21 AM	PHl3 MFC set to  0.000000
3/19/2011	3:43:21 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:43:21 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:43:21 AM	Tube furnace set to 0
3/19/2011	3:43:21 AM	Helium valve closed
3/19/2011	3:43:21 AM	H2 valve closed
3/19/2011	3:43:21 AM	BCl3 valve closed
3/19/2011	3:43:21 AM	PH3 valve closed
3/19/2011	3:43:21 AM	SiCl4 pre valve closed
3/19/2011	3:43:21 AM	SiCl4 post valve closed
3/19/2011	3:43:21 AM	Bubbler valve closed
3/19/2011	3:43:21 AM	Main Vac valve opened
3/19/2011	3:43:21 AM	Bypass valve opened
3/19/2011	3:43:21 AM	Helium MFC set to  0.000000
3/19/2011	3:43:21 AM	H2 MFC set to  0.000000
3/19/2011	3:43:21 AM	BCl3 MFC set to  0.000000
3/19/2011	3:43:21 AM	PHl3 MFC set to  0.000000
3/19/2011	3:43:21 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:43:21 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:43:21 AM	Tube furnace set to 0
3/19/2011	3:44:21 AM	H2 valve closed
3/19/2011	3:44:21 AM	BCl3 valve closed
3/19/2011	3:44:21 AM	PH3 valve closed
3/19/2011	3:44:21 AM	SiCl4 pre valve closed
3/19/2011	3:44:21 AM	SiCl4 post valve closed
3/19/2011	3:44:21 AM	Bubbler valve closed
3/19/2011	3:44:21 AM	Helium valve opened
3/19/2011	3:44:21 AM	Main Vac valve opened
3/19/2011	3:44:21 AM	Bypass valve opened
3/19/2011	3:44:21 AM	Helium MFC set to  100.000000
3/19/2011	3:44:21 AM	H2 MFC set to  0.000000
3/19/2011	3:44:21 AM	BCl3 MFC set to  0.000000
3/19/2011	3:44:21 AM	PHl3 MFC set to  0.000000
3/19/2011	3:44:21 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:44:21 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:44:22 AM	Tube furnace set to 0
3/19/2011	3:45:22 AM	Helium valve closed
3/19/2011	3:45:22 AM	H2 valve closed
3/19/2011	3:45:22 AM	BCl3 valve closed
3/19/2011	3:45:22 AM	PH3 valve closed
3/19/2011	3:45:22 AM	SiCl4 pre valve closed
3/19/2011	3:45:22 AM	SiCl4 post valve closed
3/19/2011	3:45:22 AM	Bubbler valve closed
3/19/2011	3:45:22 AM	Main Vac valve opened
3/19/2011	3:45:22 AM	Bypass valve opened
3/19/2011	3:45:22 AM	Helium MFC set to  0.000000
3/19/2011	3:45:22 AM	H2 MFC set to  0.000000
3/19/2011	3:45:22 AM	BCl3 MFC set to  0.000000
3/19/2011	3:45:22 AM	PHl3 MFC set to  0.000000
3/19/2011	3:45:22 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:45:22 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:45:22 AM	Tube furnace set to 0
3/19/2011	3:46:22 AM	H2 valve closed
3/19/2011	3:46:22 AM	BCl3 valve closed
3/19/2011	3:46:22 AM	PH3 valve closed
3/19/2011	3:46:22 AM	SiCl4 pre valve closed
3/19/2011	3:46:22 AM	SiCl4 post valve closed
3/19/2011	3:46:22 AM	Bubbler valve closed
3/19/2011	3:46:22 AM	Helium valve opened
3/19/2011	3:46:22 AM	Main Vac valve opened
3/19/2011	3:46:22 AM	Bypass valve opened
3/19/2011	3:46:22 AM	Helium MFC set to  100.000000
3/19/2011	3:46:22 AM	H2 MFC set to  0.000000
3/19/2011	3:46:22 AM	BCl3 MFC set to  0.000000
3/19/2011	3:46:22 AM	PHl3 MFC set to  0.000000
3/19/2011	3:46:22 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:46:22 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:46:22 AM	Tube furnace set to 0
3/19/2011	3:47:22 AM	Helium valve closed
3/19/2011	3:47:22 AM	H2 valve closed
3/19/2011	3:47:22 AM	BCl3 valve closed
3/19/2011	3:47:22 AM	PH3 valve closed
3/19/2011	3:47:22 AM	SiCl4 pre valve closed
3/19/2011	3:47:22 AM	SiCl4 post valve closed
3/19/2011	3:47:22 AM	Bubbler valve closed
3/19/2011	3:47:22 AM	Main Vac valve opened
3/19/2011	3:47:22 AM	Bypass valve opened
3/19/2011	3:47:22 AM	Helium MFC set to  0.000000
3/19/2011	3:47:22 AM	H2 MFC set to  0.000000
3/19/2011	3:47:22 AM	BCl3 MFC set to  0.000000
3/19/2011	3:47:22 AM	PHl3 MFC set to  0.000000
3/19/2011	3:47:22 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:47:22 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:47:22 AM	Tube furnace set to 0
3/19/2011	3:48:22 AM	H2 valve closed
3/19/2011	3:48:22 AM	BCl3 valve closed
3/19/2011	3:48:22 AM	PH3 valve closed
3/19/2011	3:48:22 AM	SiCl4 pre valve closed
3/19/2011	3:48:22 AM	SiCl4 post valve closed
3/19/2011	3:48:22 AM	Bubbler valve closed
3/19/2011	3:48:22 AM	Helium valve opened
3/19/2011	3:48:22 AM	Main Vac valve opened
3/19/2011	3:48:22 AM	Bypass valve opened
3/19/2011	3:48:22 AM	Helium MFC set to  100.000000
3/19/2011	3:48:22 AM	H2 MFC set to  0.000000
3/19/2011	3:48:22 AM	BCl3 MFC set to  0.000000
3/19/2011	3:48:22 AM	PHl3 MFC set to  0.000000
3/19/2011	3:48:22 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:48:22 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:48:22 AM	Tube furnace set to 0
3/19/2011	3:49:22 AM	Helium valve closed
3/19/2011	3:49:22 AM	H2 valve closed
3/19/2011	3:49:22 AM	BCl3 valve closed
3/19/2011	3:49:22 AM	PH3 valve closed
3/19/2011	3:49:22 AM	SiCl4 pre valve closed
3/19/2011	3:49:22 AM	SiCl4 post valve closed
3/19/2011	3:49:22 AM	Bubbler valve closed
3/19/2011	3:49:22 AM	Main Vac valve opened
3/19/2011	3:49:22 AM	Bypass valve opened
3/19/2011	3:49:22 AM	Helium MFC set to  0.000000
3/19/2011	3:49:22 AM	H2 MFC set to  0.000000
3/19/2011	3:49:22 AM	BCl3 MFC set to  0.000000
3/19/2011	3:49:22 AM	PHl3 MFC set to  0.000000
3/19/2011	3:49:22 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:49:22 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:49:23 AM	Tube furnace set to 0
3/19/2011	3:50:23 AM	H2 valve closed
3/19/2011	3:50:23 AM	BCl3 valve closed
3/19/2011	3:50:23 AM	PH3 valve closed
3/19/2011	3:50:23 AM	SiCl4 pre valve closed
3/19/2011	3:50:23 AM	SiCl4 post valve closed
3/19/2011	3:50:23 AM	Bubbler valve closed
3/19/2011	3:50:23 AM	Helium valve opened
3/19/2011	3:50:23 AM	Main Vac valve opened
3/19/2011	3:50:23 AM	Bypass valve opened
3/19/2011	3:50:23 AM	Helium MFC set to  100.000000
3/19/2011	3:50:23 AM	H2 MFC set to  0.000000
3/19/2011	3:50:23 AM	BCl3 MFC set to  0.000000
3/19/2011	3:50:23 AM	PHl3 MFC set to  0.000000
3/19/2011	3:50:23 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:50:23 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:50:23 AM	Tube furnace set to 0
3/19/2011	3:51:23 AM	Helium valve closed
3/19/2011	3:51:23 AM	H2 valve closed
3/19/2011	3:51:23 AM	BCl3 valve closed
3/19/2011	3:51:23 AM	PH3 valve closed
3/19/2011	3:51:23 AM	SiCl4 pre valve closed
3/19/2011	3:51:23 AM	SiCl4 post valve closed
3/19/2011	3:51:23 AM	Bubbler valve closed
3/19/2011	3:51:23 AM	Main Vac valve opened
3/19/2011	3:51:23 AM	Bypass valve opened
3/19/2011	3:51:23 AM	Helium MFC set to  0.000000
3/19/2011	3:51:23 AM	H2 MFC set to  0.000000
3/19/2011	3:51:23 AM	BCl3 MFC set to  0.000000
3/19/2011	3:51:23 AM	PHl3 MFC set to  0.000000
3/19/2011	3:51:23 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:51:23 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:51:23 AM	Tube furnace set to 0
3/19/2011	3:52:23 AM	H2 valve closed
3/19/2011	3:52:23 AM	BCl3 valve closed
3/19/2011	3:52:23 AM	PH3 valve closed
3/19/2011	3:52:23 AM	SiCl4 pre valve closed
3/19/2011	3:52:23 AM	SiCl4 post valve closed
3/19/2011	3:52:23 AM	Bubbler valve closed
3/19/2011	3:52:23 AM	Helium valve opened
3/19/2011	3:52:23 AM	Main Vac valve opened
3/19/2011	3:52:23 AM	Bypass valve opened
3/19/2011	3:52:23 AM	Helium MFC set to  100.000000
3/19/2011	3:52:23 AM	H2 MFC set to  0.000000
3/19/2011	3:52:23 AM	BCl3 MFC set to  0.000000
3/19/2011	3:52:23 AM	PHl3 MFC set to  0.000000
3/19/2011	3:52:23 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:52:23 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:52:23 AM	Tube furnace set to 0
3/19/2011	3:53:23 AM	Helium valve closed
3/19/2011	3:53:23 AM	H2 valve closed
3/19/2011	3:53:23 AM	BCl3 valve closed
3/19/2011	3:53:23 AM	PH3 valve closed
3/19/2011	3:53:23 AM	SiCl4 pre valve closed
3/19/2011	3:53:23 AM	SiCl4 post valve closed
3/19/2011	3:53:23 AM	Bubbler valve closed
3/19/2011	3:53:23 AM	Main Vac valve opened
3/19/2011	3:53:23 AM	Bypass valve opened
3/19/2011	3:53:23 AM	Helium MFC set to  0.000000
3/19/2011	3:53:23 AM	H2 MFC set to  0.000000
3/19/2011	3:53:23 AM	BCl3 MFC set to  0.000000
3/19/2011	3:53:23 AM	PHl3 MFC set to  0.000000
3/19/2011	3:53:23 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:53:23 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:53:23 AM	Tube furnace set to 0
3/19/2011	3:54:23 AM	H2 valve closed
3/19/2011	3:54:23 AM	BCl3 valve closed
3/19/2011	3:54:23 AM	PH3 valve closed
3/19/2011	3:54:23 AM	SiCl4 pre valve closed
3/19/2011	3:54:23 AM	SiCl4 post valve closed
3/19/2011	3:54:23 AM	Bubbler valve closed
3/19/2011	3:54:23 AM	Helium valve opened
3/19/2011	3:54:23 AM	Main Vac valve opened
3/19/2011	3:54:23 AM	Bypass valve opened
3/19/2011	3:54:23 AM	Helium MFC set to  100.000000
3/19/2011	3:54:23 AM	H2 MFC set to  0.000000
3/19/2011	3:54:23 AM	BCl3 MFC set to  0.000000
3/19/2011	3:54:23 AM	PHl3 MFC set to  0.000000
3/19/2011	3:54:23 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:54:23 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:54:24 AM	Tube furnace set to 0
3/19/2011	3:55:24 AM	Helium valve closed
3/19/2011	3:55:24 AM	H2 valve closed
3/19/2011	3:55:24 AM	BCl3 valve closed
3/19/2011	3:55:24 AM	PH3 valve closed
3/19/2011	3:55:24 AM	SiCl4 pre valve closed
3/19/2011	3:55:24 AM	SiCl4 post valve closed
3/19/2011	3:55:24 AM	Bubbler valve closed
3/19/2011	3:55:24 AM	Main Vac valve opened
3/19/2011	3:55:24 AM	Bypass valve opened
3/19/2011	3:55:24 AM	Helium MFC set to  0.000000
3/19/2011	3:55:24 AM	H2 MFC set to  0.000000
3/19/2011	3:55:24 AM	BCl3 MFC set to  0.000000
3/19/2011	3:55:24 AM	PHl3 MFC set to  0.000000
3/19/2011	3:55:24 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:55:24 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:55:24 AM	Tube furnace set to 0
3/19/2011	3:56:24 AM	H2 valve closed
3/19/2011	3:56:24 AM	BCl3 valve closed
3/19/2011	3:56:24 AM	PH3 valve closed
3/19/2011	3:56:24 AM	SiCl4 pre valve closed
3/19/2011	3:56:24 AM	SiCl4 post valve closed
3/19/2011	3:56:24 AM	Bubbler valve closed
3/19/2011	3:56:24 AM	Helium valve opened
3/19/2011	3:56:24 AM	Main Vac valve opened
3/19/2011	3:56:24 AM	Bypass valve opened
3/19/2011	3:56:24 AM	Helium MFC set to  100.000000
3/19/2011	3:56:24 AM	H2 MFC set to  0.000000
3/19/2011	3:56:24 AM	BCl3 MFC set to  0.000000
3/19/2011	3:56:24 AM	PHl3 MFC set to  0.000000
3/19/2011	3:56:24 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:56:24 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:56:24 AM	Tube furnace set to 0
3/19/2011	3:57:24 AM	Helium valve closed
3/19/2011	3:57:24 AM	H2 valve closed
3/19/2011	3:57:24 AM	BCl3 valve closed
3/19/2011	3:57:24 AM	PH3 valve closed
3/19/2011	3:57:24 AM	SiCl4 pre valve closed
3/19/2011	3:57:24 AM	SiCl4 post valve closed
3/19/2011	3:57:24 AM	Bubbler valve closed
3/19/2011	3:57:24 AM	Main Vac valve opened
3/19/2011	3:57:24 AM	Bypass valve opened
3/19/2011	3:57:24 AM	Helium MFC set to  0.000000
3/19/2011	3:57:24 AM	H2 MFC set to  0.000000
3/19/2011	3:57:24 AM	BCl3 MFC set to  0.000000
3/19/2011	3:57:24 AM	PHl3 MFC set to  0.000000
3/19/2011	3:57:24 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:57:24 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:57:24 AM	Tube furnace set to 0
3/19/2011	3:58:24 AM	H2 valve closed
3/19/2011	3:58:24 AM	BCl3 valve closed
3/19/2011	3:58:24 AM	PH3 valve closed
3/19/2011	3:58:24 AM	SiCl4 pre valve closed
3/19/2011	3:58:24 AM	SiCl4 post valve closed
3/19/2011	3:58:24 AM	Bubbler valve closed
3/19/2011	3:58:24 AM	Helium valve opened
3/19/2011	3:58:24 AM	Main Vac valve opened
3/19/2011	3:58:24 AM	Bypass valve opened
3/19/2011	3:58:24 AM	Helium MFC set to  100.000000
3/19/2011	3:58:24 AM	H2 MFC set to  0.000000
3/19/2011	3:58:24 AM	BCl3 MFC set to  0.000000
3/19/2011	3:58:24 AM	PHl3 MFC set to  0.000000
3/19/2011	3:58:24 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:58:24 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:58:24 AM	Tube furnace set to 0
3/19/2011	3:59:24 AM	Helium valve closed
3/19/2011	3:59:24 AM	H2 valve closed
3/19/2011	3:59:24 AM	BCl3 valve closed
3/19/2011	3:59:24 AM	PH3 valve closed
3/19/2011	3:59:24 AM	SiCl4 pre valve closed
3/19/2011	3:59:24 AM	SiCl4 post valve closed
3/19/2011	3:59:25 AM	Bubbler valve closed
3/19/2011	3:59:25 AM	Main Vac valve opened
3/19/2011	3:59:25 AM	Bypass valve opened
3/19/2011	3:59:25 AM	Helium MFC set to  0.000000
3/19/2011	3:59:25 AM	H2 MFC set to  0.000000
3/19/2011	3:59:25 AM	BCl3 MFC set to  0.000000
3/19/2011	3:59:25 AM	PHl3 MFC set to  0.000000
3/19/2011	3:59:25 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:59:25 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:59:25 AM	Tube furnace set to 0
3/19/2011	3:59:39 AM	Run aborted at 3:59 AM
3/19/2011	3:59:39 AM	Helium valve closed
3/19/2011	3:59:39 AM	H2 valve closed
3/19/2011	3:59:39 AM	BCl3 valve closed
3/19/2011	3:59:39 AM	PH3 valve closed
3/19/2011	3:59:39 AM	SiCl4 pre valve closed
3/19/2011	3:59:39 AM	SiCl4 post valve closed
3/19/2011	3:59:39 AM	Bypass valve closed
3/19/2011	3:59:39 AM	Main Vac valve closed
3/19/2011	3:59:39 AM	Bubbler valve closed
3/19/2011	3:59:39 AM	Helium MFC set to  0.000000
3/19/2011	3:59:39 AM	H2 MFC set to  0.000000
3/19/2011	3:59:39 AM	BCl3 MFC set to  0.000000
3/19/2011	3:59:39 AM	PHl3 MFC set to  0.000000
3/19/2011	3:59:39 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:59:40 AM	Tube furnace set to 0
3/19/2011	3:59:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/19/2011	3:59:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	3:59:41 AM	Recipe started at 3:59 AM
3/19/2011	3:59:41 AM	Helium valve closed
3/19/2011	3:59:41 AM	H2 valve closed
3/19/2011	3:59:41 AM	BCl3 valve closed
3/19/2011	3:59:41 AM	PH3 valve closed
3/19/2011	3:59:41 AM	SiCl4 pre valve closed
3/19/2011	3:59:41 AM	SiCl4 post valve closed
3/19/2011	3:59:41 AM	Main Vac valve closed
3/19/2011	3:59:41 AM	Bubbler valve closed
3/19/2011	3:59:41 AM	Bypass valve opened
3/19/2011	3:59:41 AM	Helium MFC set to  0.000000
3/19/2011	3:59:41 AM	H2 MFC set to  0.000000
3/19/2011	3:59:41 AM	BCl3 MFC set to  0.000000
3/19/2011	3:59:41 AM	PHl3 MFC set to  0.000000
3/19/2011	3:59:41 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:59:41 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:59:41 AM	Tube furnace set to 0
3/19/2011	3:59:42 AM	Helium valve closed
3/19/2011	3:59:42 AM	H2 valve closed
3/19/2011	3:59:42 AM	BCl3 valve closed
3/19/2011	3:59:42 AM	PH3 valve closed
3/19/2011	3:59:42 AM	SiCl4 pre valve closed
3/19/2011	3:59:42 AM	SiCl4 post valve closed
3/19/2011	3:59:42 AM	Bubbler valve closed
3/19/2011	3:59:42 AM	Main Vac valve opened
3/19/2011	3:59:42 AM	Bypass valve opened
3/19/2011	3:59:42 AM	Helium MFC set to  0.000000
3/19/2011	3:59:42 AM	H2 MFC set to  0.000000
3/19/2011	3:59:42 AM	BCl3 MFC set to  0.000000
3/19/2011	3:59:42 AM	PHl3 MFC set to  0.000000
3/19/2011	3:59:42 AM	SiCl4 MFC set to  0.000000
3/19/2011	3:59:42 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:59:42 AM	Tube furnace set to 0
3/19/2011	3:59:42 AM	Run finished at 3:59 AM
3/19/2011	3:59:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	4:00:06 AM	Helium MFC set to  100.000000
3/19/2011	4:00:07 AM	Helium valve opened
3/19/2011	4:01:51 AM	Helium MFC set to  0.000000
3/19/2011	4:01:52 AM	Helium valve closed
3/19/2011	4:02:34 AM	Recipe started at 4:02 AM
3/19/2011	4:02:34 AM	Helium valve closed
3/19/2011	4:02:34 AM	BCl3 valve closed
3/19/2011	4:02:34 AM	PH3 valve closed
3/19/2011	4:02:34 AM	SiCl4 pre valve closed
3/19/2011	4:02:34 AM	SiCl4 post valve closed
3/19/2011	4:02:34 AM	Main Vac valve closed
3/19/2011	4:02:34 AM	Bypass valve closed
3/19/2011	4:02:34 AM	Bubbler valve closed
3/19/2011	4:02:34 AM	H2 valve opened
3/19/2011	4:02:34 AM	Helium MFC set to  0.000000
3/19/2011	4:02:34 AM	H2 MFC set to  500.000000
3/19/2011	4:02:34 AM	BCl3 MFC set to  0.000000
3/19/2011	4:02:34 AM	PHl3 MFC set to  0.000000
3/19/2011	4:02:34 AM	SiCl4 MFC set to  0.000000
3/19/2011	4:02:34 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	4:02:34 AM	Tube furnace set to 0
3/19/2011	4:03:52 AM	Helium valve closed
3/19/2011	4:03:52 AM	BCl3 valve closed
3/19/2011	4:03:52 AM	PH3 valve closed
3/19/2011	4:03:52 AM	SiCl4 pre valve closed
3/19/2011	4:03:52 AM	SiCl4 post valve closed
3/19/2011	4:03:52 AM	Main Vac valve closed
3/19/2011	4:03:52 AM	Bypass valve closed
3/19/2011	4:03:52 AM	H2 valve opened
3/19/2011	4:03:52 AM	Bubbler valve opened
3/19/2011	4:03:52 AM	Helium MFC set to  0.000000
3/19/2011	4:03:52 AM	H2 MFC set to  500.000000
3/19/2011	4:03:52 AM	BCl3 MFC set to  0.000000
3/19/2011	4:03:52 AM	PHl3 MFC set to  0.000000
3/19/2011	4:03:52 AM	SiCl4 MFC set to  0.000000
3/19/2011	4:03:52 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	4:03:52 AM	Tube furnace set to 1000
3/19/2011	4:22:12 AM	Helium valve closed
3/19/2011	4:22:12 AM	PH3 valve closed
3/19/2011	4:22:12 AM	Main Vac valve closed
3/19/2011	4:22:12 AM	Bypass valve closed
3/19/2011	4:22:12 AM	H2 valve opened
3/19/2011	4:22:12 AM	BCl3 valve opened
3/19/2011	4:22:12 AM	SiCl4 pre valve opened
3/19/2011	4:22:12 AM	SiCl4 post valve opened
3/19/2011	4:22:12 AM	Bubbler valve opened
3/19/2011	4:22:12 AM	Helium MFC set to  0.000000
3/19/2011	4:22:12 AM	H2 MFC set to  500.000000
3/19/2011	4:22:12 AM	BCl3 MFC set to  3.000000
3/19/2011	4:22:12 AM	PHl3 MFC set to  0.000000
3/19/2011	4:22:12 AM	SiCl4 MFC set to  60.000000
3/19/2011	4:22:12 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	4:22:12 AM	Tube furnace set to 1000
3/19/2011	4:42:12 AM	H2 valve closed
3/19/2011	4:42:12 AM	BCl3 valve closed
3/19/2011	4:42:12 AM	PH3 valve closed
3/19/2011	4:42:12 AM	SiCl4 pre valve closed
3/19/2011	4:42:12 AM	SiCl4 post valve closed
3/19/2011	4:42:12 AM	Main Vac valve closed
3/19/2011	4:42:12 AM	Bypass valve closed
3/19/2011	4:42:12 AM	Helium valve opened
3/19/2011	4:42:12 AM	Bubbler valve opened
3/19/2011	4:42:12 AM	Helium MFC set to  500.000000
3/19/2011	4:42:12 AM	H2 MFC set to  0.000000
3/19/2011	4:42:12 AM	BCl3 MFC set to  0.000000
3/19/2011	4:42:12 AM	PHl3 MFC set to  0.000000
3/19/2011	4:42:12 AM	SiCl4 MFC set to  0.000000
3/19/2011	4:42:12 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	4:42:12 AM	Tube furnace set to 0
3/19/2011	5:02:12 AM	Helium valve closed
3/19/2011	5:02:12 AM	H2 valve closed
3/19/2011	5:02:12 AM	BCl3 valve closed
3/19/2011	5:02:12 AM	PH3 valve closed
3/19/2011	5:02:12 AM	SiCl4 pre valve closed
3/19/2011	5:02:12 AM	SiCl4 post valve closed
3/19/2011	5:02:12 AM	Main Vac valve closed
3/19/2011	5:02:12 AM	Bypass valve closed
3/19/2011	5:02:12 AM	Bubbler valve closed
3/19/2011	5:02:12 AM	Helium MFC set to  0.000000
3/19/2011	5:02:12 AM	H2 MFC set to  0.000000
3/19/2011	5:02:12 AM	BCl3 MFC set to  0.000000
3/19/2011	5:02:12 AM	PHl3 MFC set to  0.000000
3/19/2011	5:02:12 AM	SiCl4 MFC set to  0.000000
3/19/2011	5:02:12 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	5:02:12 AM	Tube furnace set to 0
3/19/2011	5:02:13 AM	Run finished at 5:02 AM
3/19/2011	9:19:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2011	9:19:09 AM	Recipe started at 9:19 AM
3/19/2011	9:19:09 AM	H2 valve closed
3/19/2011	9:19:09 AM	BCl3 valve closed
3/19/2011	9:19:09 AM	PH3 valve closed
3/19/2011	9:19:09 AM	SiCl4 pre valve closed
3/19/2011	9:19:09 AM	SiCl4 post valve closed
3/19/2011	9:19:09 AM	Main Vac valve closed
3/19/2011	9:19:09 AM	Bypass valve closed
3/19/2011	9:19:09 AM	Bubbler valve closed
3/19/2011	9:19:09 AM	Helium valve opened
3/19/2011	9:19:09 AM	Helium MFC set to  500.000000
3/19/2011	9:19:09 AM	H2 MFC set to  0.000000
3/19/2011	9:19:09 AM	BCl3 MFC set to  0.000000
3/19/2011	9:19:09 AM	PHl3 MFC set to  0.000000
3/19/2011	9:19:09 AM	SiCl4 MFC set to  0.000000
3/19/2011	9:19:09 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	9:19:10 AM	Tube furnace set to 0
3/19/2011	9:19:19 AM	Helium valve closed
3/19/2011	9:19:19 AM	H2 valve closed
3/19/2011	9:19:19 AM	BCl3 valve closed
3/19/2011	9:19:19 AM	PH3 valve closed
3/19/2011	9:19:19 AM	SiCl4 pre valve closed
3/19/2011	9:19:19 AM	SiCl4 post valve closed
3/19/2011	9:19:19 AM	Main Vac valve closed
3/19/2011	9:19:19 AM	Bypass valve closed
3/19/2011	9:19:19 AM	Bubbler valve closed
3/19/2011	9:19:19 AM	Helium MFC set to  0.000000
3/19/2011	9:19:19 AM	H2 MFC set to  0.000000
3/19/2011	9:19:19 AM	BCl3 MFC set to  0.000000
3/19/2011	9:19:19 AM	PHl3 MFC set to  0.000000
3/19/2011	9:19:19 AM	SiCl4 MFC set to  0.000000
3/19/2011	9:19:19 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	9:19:19 AM	Tube furnace set to 0
3/19/2011	9:19:20 AM	Run finished at 9:19 AM
3/19/2011	9:19:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2011	9:24:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	9:24:36 AM	Recipe started at 9:24 AM
3/19/2011	9:24:36 AM	Helium valve closed
3/19/2011	9:24:36 AM	H2 valve closed
3/19/2011	9:24:36 AM	BCl3 valve closed
3/19/2011	9:24:36 AM	PH3 valve closed
3/19/2011	9:24:36 AM	SiCl4 pre valve closed
3/19/2011	9:24:36 AM	SiCl4 post valve closed
3/19/2011	9:24:36 AM	Main Vac valve closed
3/19/2011	9:24:36 AM	Bubbler valve closed
3/19/2011	9:24:36 AM	Bypass valve opened
3/19/2011	9:24:36 AM	Helium MFC set to  0.000000
3/19/2011	9:24:36 AM	H2 MFC set to  0.000000
3/19/2011	9:24:36 AM	BCl3 MFC set to  0.000000
3/19/2011	9:24:36 AM	PHl3 MFC set to  0.000000
3/19/2011	9:24:36 AM	SiCl4 MFC set to  0.000000
3/19/2011	9:24:36 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	9:24:37 AM	Tube furnace set to 0
3/19/2011	9:25:10 AM	Helium valve closed
3/19/2011	9:25:10 AM	H2 valve closed
3/19/2011	9:25:10 AM	BCl3 valve closed
3/19/2011	9:25:10 AM	PH3 valve closed
3/19/2011	9:25:10 AM	SiCl4 pre valve closed
3/19/2011	9:25:10 AM	SiCl4 post valve closed
3/19/2011	9:25:10 AM	Bubbler valve closed
3/19/2011	9:25:10 AM	Main Vac valve opened
3/19/2011	9:25:10 AM	Bypass valve opened
3/19/2011	9:25:10 AM	Helium MFC set to  0.000000
3/19/2011	9:25:10 AM	H2 MFC set to  0.000000
3/19/2011	9:25:10 AM	BCl3 MFC set to  0.000000
3/19/2011	9:25:10 AM	PHl3 MFC set to  0.000000
3/19/2011	9:25:10 AM	SiCl4 MFC set to  0.000000
3/19/2011	9:25:10 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	9:25:10 AM	Tube furnace set to 0
3/19/2011	9:25:11 AM	Run finished at 9:25 AM
3/19/2011	9:25:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	10:52:08 AM	Recipe started at 10:52 AM
3/19/2011	10:52:08 AM	Helium valve closed
3/19/2011	10:52:08 AM	BCl3 valve closed
3/19/2011	10:52:08 AM	PH3 valve closed
3/19/2011	10:52:08 AM	SiCl4 pre valve closed
3/19/2011	10:52:08 AM	SiCl4 post valve closed
3/19/2011	10:52:08 AM	Main Vac valve closed
3/19/2011	10:52:08 AM	Bypass valve closed
3/19/2011	10:52:08 AM	Bubbler valve closed
3/19/2011	10:52:08 AM	H2 valve opened
3/19/2011	10:52:08 AM	Helium MFC set to  0.000000
3/19/2011	10:52:08 AM	H2 MFC set to  500.000000
3/19/2011	10:52:08 AM	BCl3 MFC set to  0.000000
3/19/2011	10:52:08 AM	PHl3 MFC set to  0.000000
3/19/2011	10:52:08 AM	SiCl4 MFC set to  0.000000
3/19/2011	10:52:08 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	10:52:08 AM	Tube furnace set to 0
3/19/2011	10:53:30 AM	Helium valve closed
3/19/2011	10:53:30 AM	BCl3 valve closed
3/19/2011	10:53:30 AM	PH3 valve closed
3/19/2011	10:53:30 AM	SiCl4 pre valve closed
3/19/2011	10:53:30 AM	SiCl4 post valve closed
3/19/2011	10:53:30 AM	Main Vac valve closed
3/19/2011	10:53:30 AM	Bypass valve closed
3/19/2011	10:53:30 AM	H2 valve opened
3/19/2011	10:53:30 AM	Bubbler valve opened
3/19/2011	10:53:30 AM	Helium MFC set to  0.000000
3/19/2011	10:53:30 AM	H2 MFC set to  500.000000
3/19/2011	10:53:30 AM	BCl3 MFC set to  0.000000
3/19/2011	10:53:30 AM	PHl3 MFC set to  0.000000
3/19/2011	10:53:30 AM	SiCl4 MFC set to  0.000000
3/19/2011	10:53:30 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	10:53:30 AM	Tube furnace set to 1000
3/19/2011	11:11:50 AM	Helium valve closed
3/19/2011	11:11:50 AM	PH3 valve closed
3/19/2011	11:11:50 AM	Main Vac valve closed
3/19/2011	11:11:50 AM	Bypass valve closed
3/19/2011	11:11:50 AM	H2 valve opened
3/19/2011	11:11:50 AM	BCl3 valve opened
3/19/2011	11:11:50 AM	SiCl4 pre valve opened
3/19/2011	11:11:50 AM	SiCl4 post valve opened
3/19/2011	11:11:50 AM	Bubbler valve opened
3/19/2011	11:11:50 AM	Helium MFC set to  0.000000
3/19/2011	11:11:50 AM	H2 MFC set to  500.000000
3/19/2011	11:11:50 AM	BCl3 MFC set to  3.000000
3/19/2011	11:11:50 AM	PHl3 MFC set to  0.000000
3/19/2011	11:11:50 AM	SiCl4 MFC set to  50.000000
3/19/2011	11:11:50 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	11:11:50 AM	Tube furnace set to 1000
3/19/2011	11:31:50 AM	H2 valve closed
3/19/2011	11:31:50 AM	BCl3 valve closed
3/19/2011	11:31:50 AM	PH3 valve closed
3/19/2011	11:31:50 AM	SiCl4 pre valve closed
3/19/2011	11:31:50 AM	SiCl4 post valve closed
3/19/2011	11:31:50 AM	Main Vac valve closed
3/19/2011	11:31:50 AM	Bypass valve closed
3/19/2011	11:31:50 AM	Helium valve opened
3/19/2011	11:31:50 AM	Bubbler valve opened
3/19/2011	11:31:50 AM	Helium MFC set to  500.000000
3/19/2011	11:31:50 AM	H2 MFC set to  0.000000
3/19/2011	11:31:50 AM	BCl3 MFC set to  0.000000
3/19/2011	11:31:50 AM	PHl3 MFC set to  0.000000
3/19/2011	11:31:50 AM	SiCl4 MFC set to  0.000000
3/19/2011	11:31:50 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	11:31:51 AM	Tube furnace set to 0
3/19/2011	11:51:51 AM	Helium valve closed
3/19/2011	11:51:51 AM	H2 valve closed
3/19/2011	11:51:51 AM	BCl3 valve closed
3/19/2011	11:51:51 AM	PH3 valve closed
3/19/2011	11:51:51 AM	SiCl4 pre valve closed
3/19/2011	11:51:51 AM	SiCl4 post valve closed
3/19/2011	11:51:51 AM	Main Vac valve closed
3/19/2011	11:51:51 AM	Bypass valve closed
3/19/2011	11:51:51 AM	Bubbler valve closed
3/19/2011	11:51:51 AM	Helium MFC set to  0.000000
3/19/2011	11:51:51 AM	H2 MFC set to  0.000000
3/19/2011	11:51:51 AM	BCl3 MFC set to  0.000000
3/19/2011	11:51:51 AM	PHl3 MFC set to  0.000000
3/19/2011	11:51:51 AM	SiCl4 MFC set to  0.000000
3/19/2011	11:51:51 AM	Bypass solenoid MFC set to  0.000000
3/19/2011	11:51:51 AM	Tube furnace set to 0
3/19/2011	11:51:51 AM	Run finished at 11:51 AM
3/19/2011	12:19:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2011	12:19:01 PM	Recipe started at 12:19 PM
3/19/2011	12:19:01 PM	H2 valve closed
3/19/2011	12:19:01 PM	BCl3 valve closed
3/19/2011	12:19:01 PM	PH3 valve closed
3/19/2011	12:19:01 PM	SiCl4 pre valve closed
3/19/2011	12:19:01 PM	SiCl4 post valve closed
3/19/2011	12:19:01 PM	Main Vac valve closed
3/19/2011	12:19:01 PM	Bypass valve closed
3/19/2011	12:19:01 PM	Bubbler valve closed
3/19/2011	12:19:01 PM	Helium valve opened
3/19/2011	12:19:01 PM	Helium MFC set to  500.000000
3/19/2011	12:19:01 PM	H2 MFC set to  0.000000
3/19/2011	12:19:01 PM	BCl3 MFC set to  0.000000
3/19/2011	12:19:01 PM	PHl3 MFC set to  0.000000
3/19/2011	12:19:01 PM	SiCl4 MFC set to  0.000000
3/19/2011	12:19:01 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:19:01 PM	Tube furnace set to 0
3/19/2011	12:19:08 PM	Helium valve closed
3/19/2011	12:19:08 PM	H2 valve closed
3/19/2011	12:19:08 PM	BCl3 valve closed
3/19/2011	12:19:08 PM	PH3 valve closed
3/19/2011	12:19:08 PM	SiCl4 pre valve closed
3/19/2011	12:19:08 PM	SiCl4 post valve closed
3/19/2011	12:19:08 PM	Main Vac valve closed
3/19/2011	12:19:08 PM	Bypass valve closed
3/19/2011	12:19:08 PM	Bubbler valve closed
3/19/2011	12:19:08 PM	Helium MFC set to  0.000000
3/19/2011	12:19:08 PM	H2 MFC set to  0.000000
3/19/2011	12:19:08 PM	BCl3 MFC set to  0.000000
3/19/2011	12:19:08 PM	PHl3 MFC set to  0.000000
3/19/2011	12:19:08 PM	SiCl4 MFC set to  0.000000
3/19/2011	12:19:08 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:19:08 PM	Tube furnace set to 0
3/19/2011	12:19:08 PM	Run finished at 12:19 PM
3/19/2011	12:19:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2011	12:26:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	12:26:02 PM	Recipe started at 12:26 PM
3/19/2011	12:26:02 PM	Helium valve closed
3/19/2011	12:26:02 PM	H2 valve closed
3/19/2011	12:26:02 PM	BCl3 valve closed
3/19/2011	12:26:02 PM	PH3 valve closed
3/19/2011	12:26:02 PM	SiCl4 pre valve closed
3/19/2011	12:26:02 PM	SiCl4 post valve closed
3/19/2011	12:26:02 PM	Main Vac valve closed
3/19/2011	12:26:02 PM	Bubbler valve closed
3/19/2011	12:26:02 PM	Bypass valve opened
3/19/2011	12:26:02 PM	Helium MFC set to  0.000000
3/19/2011	12:26:02 PM	H2 MFC set to  0.000000
3/19/2011	12:26:02 PM	BCl3 MFC set to  0.000000
3/19/2011	12:26:02 PM	PHl3 MFC set to  0.000000
3/19/2011	12:26:02 PM	SiCl4 MFC set to  0.000000
3/19/2011	12:26:02 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:26:02 PM	Tube furnace set to 0
3/19/2011	12:26:35 PM	Helium valve closed
3/19/2011	12:26:35 PM	H2 valve closed
3/19/2011	12:26:35 PM	BCl3 valve closed
3/19/2011	12:26:35 PM	PH3 valve closed
3/19/2011	12:26:35 PM	SiCl4 pre valve closed
3/19/2011	12:26:35 PM	SiCl4 post valve closed
3/19/2011	12:26:35 PM	Bubbler valve closed
3/19/2011	12:26:35 PM	Main Vac valve opened
3/19/2011	12:26:35 PM	Bypass valve opened
3/19/2011	12:26:35 PM	Helium MFC set to  0.000000
3/19/2011	12:26:35 PM	H2 MFC set to  0.000000
3/19/2011	12:26:35 PM	BCl3 MFC set to  0.000000
3/19/2011	12:26:35 PM	PHl3 MFC set to  0.000000
3/19/2011	12:26:35 PM	SiCl4 MFC set to  0.000000
3/19/2011	12:26:35 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	12:26:35 PM	Tube furnace set to 0
3/19/2011	12:26:35 PM	Run finished at 12:26 PM
3/19/2011	12:26:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	1:32:40 PM	Recipe started at 1:32 PM
3/19/2011	1:32:40 PM	Helium valve closed
3/19/2011	1:32:40 PM	BCl3 valve closed
3/19/2011	1:32:40 PM	PH3 valve closed
3/19/2011	1:32:40 PM	SiCl4 pre valve closed
3/19/2011	1:32:40 PM	SiCl4 post valve closed
3/19/2011	1:32:40 PM	Main Vac valve closed
3/19/2011	1:32:40 PM	Bypass valve closed
3/19/2011	1:32:40 PM	Bubbler valve closed
3/19/2011	1:32:40 PM	H2 valve opened
3/19/2011	1:32:40 PM	Helium MFC set to  0.000000
3/19/2011	1:32:40 PM	H2 MFC set to  500.000000
3/19/2011	1:32:40 PM	BCl3 MFC set to  0.000000
3/19/2011	1:32:40 PM	PHl3 MFC set to  0.000000
3/19/2011	1:32:40 PM	SiCl4 MFC set to  0.000000
3/19/2011	1:32:40 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	1:32:40 PM	Tube furnace set to 0
3/19/2011	1:34:00 PM	Helium valve closed
3/19/2011	1:34:00 PM	BCl3 valve closed
3/19/2011	1:34:00 PM	PH3 valve closed
3/19/2011	1:34:00 PM	SiCl4 pre valve closed
3/19/2011	1:34:00 PM	SiCl4 post valve closed
3/19/2011	1:34:00 PM	Main Vac valve closed
3/19/2011	1:34:00 PM	Bypass valve closed
3/19/2011	1:34:00 PM	H2 valve opened
3/19/2011	1:34:00 PM	Bubbler valve opened
3/19/2011	1:34:00 PM	Helium MFC set to  0.000000
3/19/2011	1:34:00 PM	H2 MFC set to  500.000000
3/19/2011	1:34:00 PM	BCl3 MFC set to  0.000000
3/19/2011	1:34:00 PM	PHl3 MFC set to  0.000000
3/19/2011	1:34:00 PM	SiCl4 MFC set to  0.000000
3/19/2011	1:34:00 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	1:34:00 PM	Tube furnace set to 1025
3/19/2011	1:52:20 PM	Helium valve closed
3/19/2011	1:52:20 PM	PH3 valve closed
3/19/2011	1:52:20 PM	Main Vac valve closed
3/19/2011	1:52:20 PM	Bypass valve closed
3/19/2011	1:52:20 PM	H2 valve opened
3/19/2011	1:52:20 PM	BCl3 valve opened
3/19/2011	1:52:20 PM	SiCl4 pre valve opened
3/19/2011	1:52:20 PM	SiCl4 post valve opened
3/19/2011	1:52:20 PM	Bubbler valve opened
3/19/2011	1:52:20 PM	Helium MFC set to  0.000000
3/19/2011	1:52:20 PM	H2 MFC set to  500.000000
3/19/2011	1:52:20 PM	BCl3 MFC set to  3.000000
3/19/2011	1:52:20 PM	PHl3 MFC set to  0.000000
3/19/2011	1:52:20 PM	SiCl4 MFC set to  50.000000
3/19/2011	1:52:20 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	1:52:20 PM	Tube furnace set to 1025
3/19/2011	2:12:20 PM	H2 valve closed
3/19/2011	2:12:20 PM	BCl3 valve closed
3/19/2011	2:12:20 PM	PH3 valve closed
3/19/2011	2:12:20 PM	SiCl4 pre valve closed
3/19/2011	2:12:20 PM	SiCl4 post valve closed
3/19/2011	2:12:20 PM	Main Vac valve closed
3/19/2011	2:12:20 PM	Bypass valve closed
3/19/2011	2:12:20 PM	Helium valve opened
3/19/2011	2:12:20 PM	Bubbler valve opened
3/19/2011	2:12:20 PM	Helium MFC set to  500.000000
3/19/2011	2:12:20 PM	H2 MFC set to  0.000000
3/19/2011	2:12:20 PM	BCl3 MFC set to  0.000000
3/19/2011	2:12:20 PM	PHl3 MFC set to  0.000000
3/19/2011	2:12:20 PM	SiCl4 MFC set to  0.000000
3/19/2011	2:12:20 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:12:20 PM	Tube furnace set to 0
3/19/2011	2:32:20 PM	Helium valve closed
3/19/2011	2:32:20 PM	H2 valve closed
3/19/2011	2:32:20 PM	BCl3 valve closed
3/19/2011	2:32:20 PM	PH3 valve closed
3/19/2011	2:32:20 PM	SiCl4 pre valve closed
3/19/2011	2:32:20 PM	SiCl4 post valve closed
3/19/2011	2:32:20 PM	Main Vac valve closed
3/19/2011	2:32:20 PM	Bypass valve closed
3/19/2011	2:32:20 PM	Bubbler valve closed
3/19/2011	2:32:20 PM	Helium MFC set to  0.000000
3/19/2011	2:32:20 PM	H2 MFC set to  0.000000
3/19/2011	2:32:20 PM	BCl3 MFC set to  0.000000
3/19/2011	2:32:20 PM	PHl3 MFC set to  0.000000
3/19/2011	2:32:20 PM	SiCl4 MFC set to  0.000000
3/19/2011	2:32:20 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:32:20 PM	Tube furnace set to 0
3/19/2011	2:32:21 PM	Run finished at 2:32 PM
3/19/2011	2:41:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	2:41:13 PM	Recipe started at 2:41 PM
3/19/2011	2:41:13 PM	Helium valve closed
3/19/2011	2:41:13 PM	H2 valve closed
3/19/2011	2:41:13 PM	BCl3 valve closed
3/19/2011	2:41:13 PM	PH3 valve closed
3/19/2011	2:41:13 PM	SiCl4 pre valve closed
3/19/2011	2:41:13 PM	SiCl4 post valve closed
3/19/2011	2:41:13 PM	Main Vac valve closed
3/19/2011	2:41:13 PM	Bubbler valve closed
3/19/2011	2:41:13 PM	Bypass valve opened
3/19/2011	2:41:13 PM	Helium MFC set to  0.000000
3/19/2011	2:41:13 PM	H2 MFC set to  0.000000
3/19/2011	2:41:13 PM	BCl3 MFC set to  0.000000
3/19/2011	2:41:13 PM	PHl3 MFC set to  0.000000
3/19/2011	2:41:13 PM	SiCl4 MFC set to  0.000000
3/19/2011	2:41:13 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:41:13 PM	Tube furnace set to 0
3/19/2011	2:41:45 PM	Helium valve closed
3/19/2011	2:41:45 PM	H2 valve closed
3/19/2011	2:41:45 PM	BCl3 valve closed
3/19/2011	2:41:45 PM	PH3 valve closed
3/19/2011	2:41:45 PM	SiCl4 pre valve closed
3/19/2011	2:41:45 PM	SiCl4 post valve closed
3/19/2011	2:41:45 PM	Bubbler valve closed
3/19/2011	2:41:45 PM	Main Vac valve opened
3/19/2011	2:41:45 PM	Bypass valve opened
3/19/2011	2:41:45 PM	Helium MFC set to  0.000000
3/19/2011	2:41:45 PM	H2 MFC set to  0.000000
3/19/2011	2:41:45 PM	BCl3 MFC set to  0.000000
3/19/2011	2:41:45 PM	PHl3 MFC set to  0.000000
3/19/2011	2:41:45 PM	SiCl4 MFC set to  0.000000
3/19/2011	2:41:45 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	2:41:45 PM	Tube furnace set to 0
3/19/2011	2:41:45 PM	Run finished at 2:41 PM
3/19/2011	2:41:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	3:20:09 PM	Recipe started at 3:20 PM
3/19/2011	3:20:09 PM	Helium valve closed
3/19/2011	3:20:10 PM	BCl3 valve closed
3/19/2011	3:20:10 PM	PH3 valve closed
3/19/2011	3:20:10 PM	SiCl4 pre valve closed
3/19/2011	3:20:10 PM	SiCl4 post valve closed
3/19/2011	3:20:10 PM	Main Vac valve closed
3/19/2011	3:20:10 PM	Bypass valve closed
3/19/2011	3:20:10 PM	Bubbler valve closed
3/19/2011	3:20:10 PM	H2 valve opened
3/19/2011	3:20:10 PM	Helium MFC set to  0.000000
3/19/2011	3:20:10 PM	H2 MFC set to  500.000000
3/19/2011	3:20:10 PM	BCl3 MFC set to  0.000000
3/19/2011	3:20:10 PM	PHl3 MFC set to  0.000000
3/19/2011	3:20:10 PM	SiCl4 MFC set to  0.000000
3/19/2011	3:20:10 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:20:10 PM	Tube furnace set to 0
3/19/2011	3:21:27 PM	Helium valve closed
3/19/2011	3:21:27 PM	BCl3 valve closed
3/19/2011	3:21:27 PM	PH3 valve closed
3/19/2011	3:21:27 PM	SiCl4 pre valve closed
3/19/2011	3:21:27 PM	SiCl4 post valve closed
3/19/2011	3:21:27 PM	Main Vac valve closed
3/19/2011	3:21:27 PM	Bypass valve closed
3/19/2011	3:21:27 PM	H2 valve opened
3/19/2011	3:21:27 PM	Bubbler valve opened
3/19/2011	3:21:27 PM	Helium MFC set to  0.000000
3/19/2011	3:21:27 PM	H2 MFC set to  500.000000
3/19/2011	3:21:27 PM	BCl3 MFC set to  0.000000
3/19/2011	3:21:27 PM	PHl3 MFC set to  0.000000
3/19/2011	3:21:27 PM	SiCl4 MFC set to  0.000000
3/19/2011	3:21:27 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:21:27 PM	Tube furnace set to 1050
3/19/2011	3:44:47 PM	Helium valve closed
3/19/2011	3:44:47 PM	PH3 valve closed
3/19/2011	3:44:47 PM	Main Vac valve closed
3/19/2011	3:44:47 PM	Bypass valve closed
3/19/2011	3:44:47 PM	H2 valve opened
3/19/2011	3:44:47 PM	BCl3 valve opened
3/19/2011	3:44:47 PM	SiCl4 pre valve opened
3/19/2011	3:44:47 PM	SiCl4 post valve opened
3/19/2011	3:44:47 PM	Bubbler valve opened
3/19/2011	3:44:47 PM	Helium MFC set to  0.000000
3/19/2011	3:44:47 PM	H2 MFC set to  500.000000
3/19/2011	3:44:47 PM	BCl3 MFC set to  3.000000
3/19/2011	3:44:47 PM	PHl3 MFC set to  0.000000
3/19/2011	3:44:47 PM	SiCl4 MFC set to  50.000000
3/19/2011	3:44:47 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	3:44:47 PM	Tube furnace set to 1050
3/19/2011	4:04:47 PM	H2 valve closed
3/19/2011	4:04:47 PM	BCl3 valve closed
3/19/2011	4:04:47 PM	PH3 valve closed
3/19/2011	4:04:47 PM	SiCl4 pre valve closed
3/19/2011	4:04:47 PM	SiCl4 post valve closed
3/19/2011	4:04:47 PM	Main Vac valve closed
3/19/2011	4:04:47 PM	Bypass valve closed
3/19/2011	4:04:47 PM	Helium valve opened
3/19/2011	4:04:47 PM	Bubbler valve opened
3/19/2011	4:04:47 PM	Helium MFC set to  500.000000
3/19/2011	4:04:47 PM	H2 MFC set to  0.000000
3/19/2011	4:04:47 PM	BCl3 MFC set to  0.000000
3/19/2011	4:04:47 PM	PHl3 MFC set to  0.000000
3/19/2011	4:04:47 PM	SiCl4 MFC set to  0.000000
3/19/2011	4:04:47 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	4:04:47 PM	Tube furnace set to 0
3/19/2011	4:24:47 PM	Helium valve closed
3/19/2011	4:24:47 PM	H2 valve closed
3/19/2011	4:24:47 PM	BCl3 valve closed
3/19/2011	4:24:47 PM	PH3 valve closed
3/19/2011	4:24:47 PM	SiCl4 pre valve closed
3/19/2011	4:24:47 PM	SiCl4 post valve closed
3/19/2011	4:24:47 PM	Main Vac valve closed
3/19/2011	4:24:47 PM	Bypass valve closed
3/19/2011	4:24:47 PM	Bubbler valve closed
3/19/2011	4:24:47 PM	Helium MFC set to  0.000000
3/19/2011	4:24:47 PM	H2 MFC set to  0.000000
3/19/2011	4:24:47 PM	BCl3 MFC set to  0.000000
3/19/2011	4:24:47 PM	PHl3 MFC set to  0.000000
3/19/2011	4:24:47 PM	SiCl4 MFC set to  0.000000
3/19/2011	4:24:47 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	4:24:47 PM	Tube furnace set to 0
3/19/2011	4:24:48 PM	Run finished at 4:24 PM
3/19/2011	4:30:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	4:30:26 PM	Recipe started at 4:30 PM
3/19/2011	4:30:26 PM	Helium valve closed
3/19/2011	4:30:26 PM	H2 valve closed
3/19/2011	4:30:26 PM	BCl3 valve closed
3/19/2011	4:30:26 PM	PH3 valve closed
3/19/2011	4:30:26 PM	SiCl4 pre valve closed
3/19/2011	4:30:26 PM	SiCl4 post valve closed
3/19/2011	4:30:26 PM	Main Vac valve closed
3/19/2011	4:30:26 PM	Bubbler valve closed
3/19/2011	4:30:26 PM	Bypass valve opened
3/19/2011	4:30:26 PM	Helium MFC set to  0.000000
3/19/2011	4:30:26 PM	H2 MFC set to  0.000000
3/19/2011	4:30:26 PM	BCl3 MFC set to  0.000000
3/19/2011	4:30:26 PM	PHl3 MFC set to  0.000000
3/19/2011	4:30:26 PM	SiCl4 MFC set to  0.000000
3/19/2011	4:30:26 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	4:30:26 PM	Tube furnace set to 0
3/19/2011	4:30:58 PM	Helium valve closed
3/19/2011	4:30:58 PM	H2 valve closed
3/19/2011	4:30:58 PM	BCl3 valve closed
3/19/2011	4:30:58 PM	PH3 valve closed
3/19/2011	4:30:58 PM	SiCl4 pre valve closed
3/19/2011	4:30:58 PM	SiCl4 post valve closed
3/19/2011	4:30:58 PM	Bubbler valve closed
3/19/2011	4:30:58 PM	Main Vac valve opened
3/19/2011	4:30:58 PM	Bypass valve opened
3/19/2011	4:30:58 PM	Helium MFC set to  0.000000
3/19/2011	4:30:58 PM	H2 MFC set to  0.000000
3/19/2011	4:30:58 PM	BCl3 MFC set to  0.000000
3/19/2011	4:30:58 PM	PHl3 MFC set to  0.000000
3/19/2011	4:30:58 PM	SiCl4 MFC set to  0.000000
3/19/2011	4:30:58 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	4:30:58 PM	Tube furnace set to 0
3/19/2011	4:30:59 PM	Run finished at 4:30 PM
3/19/2011	4:30:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	5:22:11 PM	Recipe started at 5:22 PM
3/19/2011	5:22:11 PM	Helium valve closed
3/19/2011	5:22:11 PM	BCl3 valve closed
3/19/2011	5:22:11 PM	PH3 valve closed
3/19/2011	5:22:11 PM	SiCl4 pre valve closed
3/19/2011	5:22:11 PM	SiCl4 post valve closed
3/19/2011	5:22:11 PM	Main Vac valve closed
3/19/2011	5:22:11 PM	Bypass valve closed
3/19/2011	5:22:11 PM	Bubbler valve closed
3/19/2011	5:22:11 PM	H2 valve opened
3/19/2011	5:22:11 PM	Helium MFC set to  0.000000
3/19/2011	5:22:11 PM	H2 MFC set to  500.000000
3/19/2011	5:22:11 PM	BCl3 MFC set to  0.000000
3/19/2011	5:22:11 PM	PHl3 MFC set to  0.000000
3/19/2011	5:22:11 PM	SiCl4 MFC set to  0.000000
3/19/2011	5:22:11 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	5:22:11 PM	Tube furnace set to 0
3/19/2011	5:23:32 PM	Helium valve closed
3/19/2011	5:23:32 PM	BCl3 valve closed
3/19/2011	5:23:32 PM	PH3 valve closed
3/19/2011	5:23:32 PM	SiCl4 pre valve closed
3/19/2011	5:23:32 PM	SiCl4 post valve closed
3/19/2011	5:23:32 PM	Main Vac valve closed
3/19/2011	5:23:32 PM	Bypass valve closed
3/19/2011	5:23:32 PM	H2 valve opened
3/19/2011	5:23:32 PM	Bubbler valve opened
3/19/2011	5:23:32 PM	Helium MFC set to  0.000000
3/19/2011	5:23:32 PM	H2 MFC set to  500.000000
3/19/2011	5:23:32 PM	BCl3 MFC set to  0.000000
3/19/2011	5:23:32 PM	PHl3 MFC set to  0.000000
3/19/2011	5:23:32 PM	SiCl4 MFC set to  0.000000
3/19/2011	5:23:32 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	5:23:32 PM	Tube furnace set to 1000
3/19/2011	5:43:32 PM	Helium valve closed
3/19/2011	5:43:32 PM	PH3 valve closed
3/19/2011	5:43:32 PM	Main Vac valve closed
3/19/2011	5:43:32 PM	Bypass valve closed
3/19/2011	5:43:32 PM	H2 valve opened
3/19/2011	5:43:32 PM	BCl3 valve opened
3/19/2011	5:43:32 PM	SiCl4 pre valve opened
3/19/2011	5:43:32 PM	SiCl4 post valve opened
3/19/2011	5:43:32 PM	Bubbler valve opened
3/19/2011	5:43:32 PM	Helium MFC set to  0.000000
3/19/2011	5:43:32 PM	H2 MFC set to  500.000000
3/19/2011	5:43:32 PM	BCl3 MFC set to  3.000000
3/19/2011	5:43:32 PM	PHl3 MFC set to  0.000000
3/19/2011	5:43:32 PM	SiCl4 MFC set to  50.000000
3/19/2011	5:43:32 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	5:43:33 PM	Tube furnace set to 1000
3/19/2011	6:03:33 PM	H2 valve closed
3/19/2011	6:03:33 PM	BCl3 valve closed
3/19/2011	6:03:33 PM	PH3 valve closed
3/19/2011	6:03:33 PM	SiCl4 pre valve closed
3/19/2011	6:03:33 PM	SiCl4 post valve closed
3/19/2011	6:03:33 PM	Main Vac valve closed
3/19/2011	6:03:33 PM	Bypass valve closed
3/19/2011	6:03:33 PM	Helium valve opened
3/19/2011	6:03:33 PM	Bubbler valve opened
3/19/2011	6:03:33 PM	Helium MFC set to  500.000000
3/19/2011	6:03:33 PM	H2 MFC set to  0.000000
3/19/2011	6:03:33 PM	BCl3 MFC set to  0.000000
3/19/2011	6:03:33 PM	PHl3 MFC set to  0.000000
3/19/2011	6:03:33 PM	SiCl4 MFC set to  0.000000
3/19/2011	6:03:33 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	6:03:33 PM	Tube furnace set to 0
3/19/2011	6:23:33 PM	Helium valve closed
3/19/2011	6:23:33 PM	H2 valve closed
3/19/2011	6:23:33 PM	BCl3 valve closed
3/19/2011	6:23:33 PM	PH3 valve closed
3/19/2011	6:23:33 PM	SiCl4 pre valve closed
3/19/2011	6:23:33 PM	SiCl4 post valve closed
3/19/2011	6:23:33 PM	Main Vac valve closed
3/19/2011	6:23:33 PM	Bypass valve closed
3/19/2011	6:23:33 PM	Bubbler valve closed
3/19/2011	6:23:33 PM	Helium MFC set to  0.000000
3/19/2011	6:23:33 PM	H2 MFC set to  0.000000
3/19/2011	6:23:33 PM	BCl3 MFC set to  0.000000
3/19/2011	6:23:33 PM	PHl3 MFC set to  0.000000
3/19/2011	6:23:33 PM	SiCl4 MFC set to  0.000000
3/19/2011	6:23:33 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	6:23:33 PM	Tube furnace set to 0
3/19/2011	6:23:33 PM	Run finished at 6:23 PM
3/19/2011	6:32:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2011	6:32:37 PM	Recipe started at 6:32 PM
3/19/2011	6:32:37 PM	H2 valve closed
3/19/2011	6:32:37 PM	BCl3 valve closed
3/19/2011	6:32:37 PM	PH3 valve closed
3/19/2011	6:32:37 PM	SiCl4 pre valve closed
3/19/2011	6:32:37 PM	SiCl4 post valve closed
3/19/2011	6:32:37 PM	Main Vac valve closed
3/19/2011	6:32:37 PM	Bypass valve closed
3/19/2011	6:32:37 PM	Bubbler valve closed
3/19/2011	6:32:37 PM	Helium valve opened
3/19/2011	6:32:37 PM	Helium MFC set to  500.000000
3/19/2011	6:32:37 PM	H2 MFC set to  0.000000
3/19/2011	6:32:37 PM	BCl3 MFC set to  0.000000
3/19/2011	6:32:37 PM	PHl3 MFC set to  0.000000
3/19/2011	6:32:37 PM	SiCl4 MFC set to  0.000000
3/19/2011	6:32:37 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	6:32:37 PM	Tube furnace set to 0
3/19/2011	6:32:42 PM	Helium valve closed
3/19/2011	6:32:42 PM	H2 valve closed
3/19/2011	6:32:42 PM	BCl3 valve closed
3/19/2011	6:32:42 PM	PH3 valve closed
3/19/2011	6:32:42 PM	SiCl4 pre valve closed
3/19/2011	6:32:42 PM	SiCl4 post valve closed
3/19/2011	6:32:42 PM	Main Vac valve closed
3/19/2011	6:32:42 PM	Bypass valve closed
3/19/2011	6:32:42 PM	Bubbler valve closed
3/19/2011	6:32:42 PM	Helium MFC set to  0.000000
3/19/2011	6:32:42 PM	H2 MFC set to  0.000000
3/19/2011	6:32:42 PM	BCl3 MFC set to  0.000000
3/19/2011	6:32:42 PM	PHl3 MFC set to  0.000000
3/19/2011	6:32:42 PM	SiCl4 MFC set to  0.000000
3/19/2011	6:32:42 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	6:32:42 PM	Tube furnace set to 0
3/19/2011	6:32:42 PM	Run finished at 6:32 PM
3/19/2011	6:32:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2011	6:37:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2011	6:37:24 PM	Recipe started at 6:37 PM
3/19/2011	6:37:24 PM	Helium valve closed
3/19/2011	6:37:24 PM	H2 valve closed
3/19/2011	6:37:24 PM	BCl3 valve closed
3/19/2011	6:37:24 PM	PH3 valve closed
3/19/2011	6:37:24 PM	SiCl4 pre valve closed
3/19/2011	6:37:24 PM	SiCl4 post valve closed
3/19/2011	6:37:24 PM	Main Vac valve closed
3/19/2011	6:37:24 PM	Bubbler valve closed
3/19/2011	6:37:24 PM	Bypass valve opened
3/19/2011	6:37:24 PM	Helium MFC set to  0.000000
3/19/2011	6:37:24 PM	H2 MFC set to  0.000000
3/19/2011	6:37:24 PM	BCl3 MFC set to  0.000000
3/19/2011	6:37:24 PM	PHl3 MFC set to  0.000000
3/19/2011	6:37:24 PM	SiCl4 MFC set to  0.000000
3/19/2011	6:37:24 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	6:37:24 PM	Tube furnace set to 0
3/19/2011	6:37:55 PM	Helium valve closed
3/19/2011	6:37:55 PM	H2 valve closed
3/19/2011	6:37:55 PM	BCl3 valve closed
3/19/2011	6:37:55 PM	PH3 valve closed
3/19/2011	6:37:55 PM	SiCl4 pre valve closed
3/19/2011	6:37:55 PM	SiCl4 post valve closed
3/19/2011	6:37:55 PM	Bubbler valve closed
3/19/2011	6:37:55 PM	Main Vac valve opened
3/19/2011	6:37:55 PM	Bypass valve opened
3/19/2011	6:37:55 PM	Helium MFC set to  0.000000
3/19/2011	6:37:55 PM	H2 MFC set to  0.000000
3/19/2011	6:37:55 PM	BCl3 MFC set to  0.000000
3/19/2011	6:37:55 PM	PHl3 MFC set to  0.000000
3/19/2011	6:37:55 PM	SiCl4 MFC set to  0.000000
3/19/2011	6:37:55 PM	Bypass solenoid MFC set to  0.000000
3/19/2011	6:37:55 PM	Tube furnace set to 0
3/19/2011	6:37:55 PM	Run finished at 6:37 PM
3/19/2011	6:37:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
